Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 24, Issue 7, 2003, Pages 687-692

  Zhou, Jun ^a   Wang, Xiaohong ^a   Yao, Pengjun ^b   Dong, Liang ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

^b SHENYANG NORMAL UNIVERSITY   (China)

Author keywords

Accelerometer; MEMS; Micromachining; Porous silicon; Sacrificial layer

Indexed keywords

EPITAXIAL GROWTH; MICROMACHINING; POROUS SILICON;

MICROELECTROMECHANICAL SYSTEMS; SACRIFICIAL LAYER;

ACCELEROMETERS;

EID: 0742284222     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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