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Volumn 100, Issue 6, 2012, Pages

Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma

(11) Cummins, Thomas a Otsuka, Takamitsu b Yugami, Noboru b,c Jiang, Weihua d Endo, Akira e Li, Bowen a O'Gorman, Colm a Dunne, Padraig a Sokell, Emma a O'Sullivan, Gerry a Higashiguchi, Takeshi b,c

a UNIVERSITY COLLEGE DUBLIN (Ireland)

b UTSUNOMIYA UNIVERSITY (Japan)

c JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

d NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

e WASEDA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EUV EMISSIONS; EUV SOURCE; EXTREME ULTRAVIOLET SOURCES; FARADAY CUPS; ION ENERGIES; ION KINETIC ENERGY; ION YIELDS; LASER INTENSITIES; PICOSECOND LASER PULSE; PULSE DURATIONS; TIME OF FLIGHT;

CONVERSION EFFICIENCY; EXTREME ULTRAVIOLET LITHOGRAPHY; GADOLINIUM; IONS; LASER PULSES; LIGHT SOURCES;

ULTRAVIOLET LASERS;

EID: 84861064189 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3684242 Document Type: Article

Times cited : (51)

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