-
1
-
-
4043112781
-
-
PHSTBO 0031-8949,. 10.1088/0031-8949/70/2-3/009
-
S. S. Churilov, Y. N. Joshi, J. Reader, and R. R. Kildiyarova, Phys. Scr. PHSTBO 0031-8949 70, 126 (2004). 10.1088/0031-8949/70/2-3/009
-
(2004)
Phys. Scr.
, vol.70
, pp. 126
-
-
Churilov, S.S.1
Joshi, Y.N.2
Reader, J.3
Kildiyarova, R.R.4
-
2
-
-
84960259042
-
-
edited by V. Bakshi (SPIE, Bellingham, WA).
-
EUV Sources for Lithography, edited by, V. Bakshi, (SPIE, Bellingham, WA, 2005).
-
(2005)
EUV Sources for Lithography
-
-
-
3
-
-
67650792447
-
-
JPCSDZ 1742-6588,. 10.1088/1742-6596/163/1/012003
-
G. O'Sullivan, A. Cummings, C. Z. Dong, P. Dunne, P. Hayden, O. Morris, E. Sokell, F. O'Reilly, M. G. Su, and J. White, J. Phys.: Conf. Ser. JPCSDZ 1742-6588 163, 012003 (2009). 10.1088/1742-6596/163/1/012003
-
(2009)
J. Phys.: Conf. Ser.
, vol.163
, pp. 012003
-
-
O'Sullivan, G.1
Cummings, A.2
Dong, C.Z.3
Dunne, P.4
Hayden, P.5
Morris, O.6
Sokell, E.7
O'Reilly, F.8
Su, M.G.9
White, J.10
-
4
-
-
77953636157
-
-
JAPIAU 0021-8979,. 10.1063/1.3373427
-
A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, S. Fujioka, T. Nishikawa, F. Koike, H. Ohasni, and H. Tanuma, J. Appl. Phys. JAPIAU 0021-8979 107, 113303 (2010). 10.1063/1.3373427
-
(2010)
J. Appl. Phys.
, vol.107
, pp. 113303
-
-
Sasaki, A.1
Sunahara, A.2
Furukawa, H.3
Nishihara, K.4
Fujioka, S.5
Nishikawa, T.6
Koike, F.7
Ohasni, H.8
Tanuma, H.9
-
5
-
-
0942268376
-
-
JAPIAU 0021-8979,. 10.1063/1.1629153
-
N. Böwering, M. Martins, W. N. Partlo, and I. V. Fomenkov, J. Appl. Phys. JAPIAU 0021-8979 95, 16 (2004). 10.1063/1.1629153
-
(2004)
J. Appl. Phys.
, vol.95
, pp. 16
-
-
Böwering, N.1
Martins, M.2
Partlo, W.N.3
Fomenkov, I.V.4
-
6
-
-
33745481331
-
Analyses of the Sn IX-Sn XII spectra in the EUV region
-
DOI 10.1088/0031-8949/73/6/014, PII S00318949062073914, 014
-
S. S. Churilov and A. N. Ryabtsev, Phys. Scr. PHSTBO 0031-8949 73, 614 (2006). 10.1088/0031-8949/73/6/014 (Pubitemid 43958955)
-
(2006)
Physica Scripta
, vol.73
, Issue.6
, pp. 614-619
-
-
Churilov, S.S.1
Ryabtsev, A.N.2
-
7
-
-
30844461230
-
Modeling of EUV emission from xenon and tin plasma sources for nanolithography
-
DOI 10.1016/j.jqsrt.2005.05.038, PII S002240730500169X
-
M. Poirier, T. Blenski, F. de Gaufridy de Dortan, and F. Gilleron, J. Quant. Spectrosc. Radiat. Transf. JQSRAE 0022-4073 99, 482 (2006). 10.1016/j.jqsrt.2005.05.038 (Pubitemid 43103091)
-
(2006)
Journal of Quantitative Spectroscopy and Radiative Transfer
, vol.99
, Issue.1-3
, pp. 482-492
-
-
Poirier, M.1
Blenski, T.2
De Gaufridy De Dortan, F.3
Gilleron, F.4
-
9
-
-
4544310414
-
-
JPAPBE 0022-3727,. 10.1088/0022-3727/37/17/006
-
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, J. White, K. Fahy, A. Fitzpatrick, L. Gaynor, P. Hayden, D. Kedzierski, D. Kilbane, M. Lysaght, L. McKinney, and P. Sheridan, J. Phys. D: Appl. Phys. JPAPBE 0022-3727 37, 2376 (2004). 10.1088/0022-3727/37/17/006
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, pp. 2376
-
-
Cummings, A.1
O'Sullivan, G.2
Dunne, P.3
Sokell, E.4
Murphy, N.5
White, J.6
Fahy, K.7
Fitzpatrick, A.8
Gaynor, L.9
Hayden, P.10
Kedzierski, D.11
Kilbane, D.12
Lysaght, M.13
McKinney, L.14
Sheridan, P.15
-
10
-
-
14544278104
-
Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody
-
DOI 10.1088/0022-3727/38/4/013
-
A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, and J. White, J. Phys. D: Appl. Phys. JPAPBE 0022-3727 38, 604 (2005). 10.1088/0022-3727/38/ 4/013 (Pubitemid 40297511)
-
(2005)
Journal of Physics D: Applied Physics
, vol.38
, Issue.4
, pp. 604-616
-
-
Cummings, A.1
O'Sullivan, G.2
Dunne, P.3
Sokell, E.4
Murphy, N.5
White, J.6
-
11
-
-
44649180382
-
Plasma physics and radiation hydrodynamics in developing
-
DOI 10.1063/1.2907154
-
K. Nishihara, A. Sunahara, A. Sasaki, M. Nunami, H. Tanuma, S. Fujioka, Y. Shimada, K. Fujima, H. Furukawa, T. Kato, F. Koike, R. More, M. Murakami, T. Nishikawa, V. Zhakhovskii, K. Gamata, A. Takata, H. Ueda, H. Nishimura, Y. Izawa, N. Miyanaga, and K. Mima, Phys. Plasmas PHPAEN 1070-664X 15, 056708 (2008). 10.1063/1.2907154 (Pubitemid 351776778)
-
(2008)
Physics of Plasmas
, vol.15
, Issue.5
, pp. 056708
-
-
Nishihara, K.1
Sunahara, A.2
Sasaki, A.3
Nunami, M.4
Tanuma, H.5
Fujioka, S.6
Shimada, Y.7
Fujima, K.8
Furukawa, H.9
Kato, T.10
Koike, F.11
More, R.12
Murakami, M.13
Nishikawa, T.14
Zhakhovskii, V.15
Gamata, K.16
Takata, A.17
Ueda, H.18
Nishimura, H.19
Izawa, Y.20
Miyanaga, N.21
Mima, K.22
more..
-
12
-
-
0042693330
-
-
JPAMA4 0022-3700,. 10.1088/0022-3700/16/17/020
-
G. O'Sullivan, J. Phys. B JPAMA4 0022-3700 16, 3291 (1983). 10.1088/0022-3700/16/17/020
-
(1983)
J. Phys. B
, vol.16
, pp. 3291
-
-
O'Sullivan, G.1
-
13
-
-
70450206676
-
-
PHSTBO 0031-8949,. 10.1088/0031-8949/80/04/045303
-
S. S. Churilov, R. R. Kilidiyarova, A. N. Ryabtsev, and S. V. Sadovsky, Phys. Scr. PHSTBO 0031-8949 80, 045303 (2009). 10.1088/0031-8949/80/04/045303
-
(2009)
Phys. Scr.
, vol.80
, pp. 045303
-
-
Churilov, S.S.1
Kilidiyarova, R.R.2
Ryabtsev, A.N.3
Sadovsky, S.V.4
-
15
-
-
0042497628
-
Indirect X-Ray line-formation processes in iron L-shell ions
-
DOI 10.1086/344745
-
M. F. Gu, Astrophys. J. ASJOAB 0004-637X 582, 1241 (2003). 10.1086/344745 (Pubitemid 37394517)
-
(2003)
Astrophysical Journal
, vol.582
, pp. 1241-1250
-
-
Gu, M.F.1
-
16
-
-
84975605035
-
-
JOBPDE 0740-3224,. 10.1364/JOSAB.10.000799
-
J. Sugar, V. Kaufman, and W. L. Rowan, J. Opt. Soc. Am. B JOBPDE 0740-3224 10, 799 (1993). 10.1364/JOSAB.10.000799
-
(1993)
J. Opt. Soc. Am. B
, vol.10
, pp. 799
-
-
Sugar, J.1
Kaufman, V.2
Rowan, W.L.3
-
17
-
-
0027639251
-
-
JOBPDE 0740-3224,. 10.1364/JOSAB.10.001321
-
J. Sugar, V. Kaufman, and W. L. Rowan, J. Opt. Soc. Am. B JOBPDE 0740-3224 10, 1321 (1993). 10.1364/JOSAB.10.001321
-
(1993)
J. Opt. Soc. Am. B
, vol.10
, pp. 1321
-
-
Sugar, J.1
Kaufman, V.2
Rowan, W.L.3
-
18
-
-
0012958350
-
-
PLRAAN 1050-2947,. 10.1103/PhysRevA.50.3710
-
W. Svendsen and G. O'Sullivan, Phys. Rev. A PLRAAN 1050-2947 50, 3710 (1994). 10.1103/PhysRevA.50.3710
-
(1994)
Phys. Rev. A
, vol.50
, pp. 3710
-
-
Svendsen, W.1
O'Sullivan, G.2
-
19
-
-
0042010095
-
-
JAPIAU 0021-8979,. 10.1063/1.1587264
-
F. Gilleron, M. Poirer, T. Blenski, M. Schmidt, and T. Ceccotti, J. Appl. Phys. JAPIAU 0021-8979 94, 2086 (2003). 10.1063/1.1587264
-
(2003)
J. Appl. Phys.
, vol.94
, pp. 2086
-
-
Gilleron, F.1
Poirer, M.2
Blenski, T.3
Schmidt, M.4
Ceccotti, T.5
-
20
-
-
67650693040
-
-
JPCSDZ 1742-6588,. 10.1088/1742-6596/163/1/012107
-
A. Sasaki, A. Sunahara, K. Nishihara, T. Nishikawa, F. Koike, and H. Tanuma, J. Phys.: Conf. Ser. JPCSDZ 1742-6588 163, 012107 (2009). 10.1088/1742-6596/163/1/012107
-
(2009)
J. Phys.: Conf. Ser.
, vol.163
, pp. 012107
-
-
Sasaki, A.1
Sunahara, A.2
Nishihara, K.3
Nishikawa, T.4
Koike, F.5
Tanuma, H.6
-
21
-
-
70350692122
-
-
JPAMA4 0022-3700,. 10.1088/0953-4075/42/16/165207
-
R. D'Arcy, H. Ohashi, S. Suda, H. Tanuma, S. Fujioka, H. Nishimura, K. Nishihara, C. Suzuki, T. Kato, F. Koike, A. O'Connor, and G. O'Sullivan, J. Phys. B JPAMA4 0022-3700 42, 165207 (2009). 10.1088/0953-4075/42/16/165207
-
(2009)
J. Phys. B
, vol.42
, pp. 165207
-
-
D'Arcy, R.1
Ohashi, H.2
Suda, S.3
Tanuma, H.4
Fujioka, S.5
Nishimura, H.6
Nishihara, K.7
Suzuki, C.8
Kato, T.9
Koike, F.10
O'Connor, A.11
O'Sullivan, G.12
-
22
-
-
0015658534
-
-
JAPIAU 0021-8979,. 10.1063/1.1662796
-
D. F. Colombant and G. F. Tonon, J. Appl. Phys. JAPIAU 0021-8979 44, 3524 (1973). 10.1063/1.1662796
-
(1973)
J. Appl. Phys.
, vol.44
, pp. 3524
-
-
Colombant, D.F.1
Tonon, G.F.2
-
23
-
-
26344479395
-
-
PLRAAN 1050-2947,. 10.1103/PhysRevA.25.275
-
P. K. Carroll and G. O'Sullivan, Phys. Rev. A PLRAAN 1050-2947 25, 275 (1982). 10.1103/PhysRevA.25.275
-
(1982)
Phys. Rev. A
, vol.25
, pp. 275
-
-
Carroll, P.K.1
O'Sullivan, G.2
-
24
-
-
0000723179
-
-
JPAMA4 0022-3700,. 10.1088/0953-4075/32/8/310
-
G. O'Sullivan, P. K. Carroll, P. Dunne, R. Faulkner, C. McGuinness, and N. Murphy, J. Phys. B JPAMA4 0022-3700 32, 1893 (1999). 10.1088/0953-4075/32/8/ 310
-
(1999)
J. Phys. B
, vol.32
, pp. 1893
-
-
O'Sullivan, G.1
Carroll, P.K.2
Dunne, P.3
Faulkner, R.4
McGuinness, C.5
Murphy, N.6
-
25
-
-
20444496525
-
Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas
-
DOI 10.1063/1.1834994
-
A. Sasaki, K. Nishihara, M. Murakami, F. Koike, T. Kagawa, T. Nishikawa, K. Fujima, T. Kawamura, and H. Furukawa, Appl. Phys. Lett. APPLAB 0003-6951 85, 5857 (2004). 10.1063/1.1834994 (Pubitemid 40817920)
-
(2004)
Applied Physics Letters
, vol.85
, Issue.24
, pp. 5857-5859
-
-
Sasaki, A.1
Nishihara, K.2
Murakami, M.3
Koike, F.4
Kagawa, T.5
Nishikawa, T.6
Fujima, K.7
Kawamura, T.8
Furukawa, H.9
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