Design of high-bandwidth high-precision flexure-based nanopositioning modules

Journal of Manufacturing Systems

Volumn 28, Issue 2-3, 2009, Pages 71-77

  Polit, Sebastian ^a   Dong, Jingyan ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN PARAMETERS; FINITE ELEMENT ANALYSIS; FLEXURE BEAM; FLEXURE DESIGNS; FLEXURE HINGE; HIGH BANDWIDTH; HIGH-PRECISION; HIGH-THROUGHPUT; NANO-MANUFACTURING; NANO-POSITIONING; PARASITIC MOTION; PERFORMANCE OBJECTIVE; PERFORMANCE REQUIREMENTS; SIMULTANEOUS ACHIEVEMENT; SINGLE DEGREE OF FREEDOMS;

BANDWIDTH; DYNAMIC RESPONSE; FINITE ELEMENT METHOD; HINGES; MACHINE DESIGN;

STRUCTURAL DESIGN;

EID: 77951099821     PISSN: 02786125     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmsy.2010.01.001     Document Type: Article

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