O 2 dissociation in Ar-O 2 surface-wave microwave discharges

Journal of Physics D: Applied Physics

Volumn 45, Issue 19, 2012, Pages

  Kutasi, Kinga ^a   Sá, Paulo A ^b,c   Guerra, Vasco ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c UNIVERSITY OF PORTO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS-SECTION PROFILE; DISSOCIATION DEGREE; ELECTRON COLLISION; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON IMPACT DISSOCIATION; IONIZATION RATES; MICROWAVE DISCHARGE; MICROWAVE FIELD; MIXTURE COMPOSITIONS; MONOTONIC VARIATIONS; PRESSURE RANGES; SELF-CONSISTENT MODEL; SURFACE WAVE DISCHARGE;

ELECTRIC DISCHARGES; IMPACT IONIZATION; MIXTURES; MOLECULES; SURFACE WAVES;

DISSOCIATION;

EID: 84860356071     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/19/195205     Document Type: Article

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