A combination of electroless and electrochemical etching methods for enhancing the uniformity of porous silicon substrate for light detection application

Applied Surface Science

Volumn 258, Issue 17, 2012, Pages 6436-6440

  Naderi, N ^a   Hashim, M R ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

Author keywords

Electrochemical anodization; FTIR; MSM photodetectors; Porous silicon; Raman spectroscopy

Indexed keywords

ELECTROCHEMICAL ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTODETECTORS; PHOTONS; RAMAN SPECTROSCOPY; SUBSTRATES;

CRYSTALLINE SILICONS; ELECTRO-CHEMICAL ANODIZATION; FTIR; MSM PHOTODETECTOR; PHOTOLUMINESCENT MATERIALS; POROUS SILICON SUBSTRATES; PULSED ELECTROCHEMICAL ETCHINGS; WAVELENGTH EMISSION;

POROUS SILICON;

EID: 84860237996     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.03.056     Document Type: Article

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