Annealing and amorphous silicon passivation of porous silicon with blue light emission

Applied Surface Science

Volumn 252, Issue 4, 2005, Pages 1065-1069

  Zhao, Yue ^a   Yang, Deren ^a   Li, Dongsheng ^a   Jiang, Minghua ^a,b  

^a ZHEJIANG UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

Amorphous silicon; Annealing; Blue emission; Porous silicon

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ELECTROCHEMISTRY; ETCHING; LIGHT EMISSION; PASSIVATION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE DISTRIBUTION;

BLUE EMISSION; ELECTROCHEMICAL ETCHING; IRRADIATIVE CENTERS; TEMPERATURE RANGE;

POROUS SILICON;

EID: 26444574118     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.01.176     Document Type: Article

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