Characterization of porous poly-silicon as a gas sensor

Sensors and Actuators, B: Chemical

Volumn 100, Issue 3, 2004, Pages 341-346

  Iraji Zad, A ^a   Rahimi, F ^a   Chavoshi, M ^a   Ahadian, M M ^a  

^a SHARIF UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

Gas sensor; Poly silicon; Porous silicon

Indexed keywords

ACETONE; ATOMIC FORCE MICROSCOPY; CARBON TETRACHLORIDE; ELECTRIC CONDUCTIVITY; ETHANOL; NANOSTRUCTURED MATERIALS; POLYSILICON; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SOLUTIONS; SURFACE TOPOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTROCHEMICAL ETCHING; GAS-SENSING PROPERTIES; POROUS POLY-SILICON (PPS);

CHEMICAL SENSORS;

EID: 2342529716     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.02.023     Document Type: Article

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