Noncontact scanning force microscopy using a direct-oscillating piezoelectric microcantilever

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 1577-1581

  Itoh, T ^a   Ohashi, T ^a   Suga, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344380905     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589193     Document Type: Article

References (16)

1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. G. Binnig, Ch. Gerber, E. Stoll, T. R. Albrecht, and C. F. Quate, Europhys. Lett. 3, 1281 (1987).
3. Y. Martin, C. C. Williams, and H. K. Wickramsinghe, J. Appl. Phys. 61, 4723 (1987).
4. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 2400 (1988).
5. T. R. Albrecht, P. Grütter, D. Home, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
6. A. Kikukawa, A. Hosaka, Y. Honda, and S. Tanaka, Appl. Phys. Lett. 61, 2607 (1992).
7. F. J. Giessibl, J. Patrin, M. Tortonese, M. D. Kirk, and Sang-il Park, presented at The 2nd International Colloquium on Scanning Tunneling Microscopy, 8-10 Dec. 1994, Kanazawa, Japan.
8. S. Kitamura, M. Iwatsuki, K. Nakamoto, S. Chiba, and H. Utsumi, presented at The 2nd International Colloquium on Scanning Tunneling Microscopy, 8-10 Dec. 1994, Kanazawa, Japan.
9. T. Itoh and T. Suga, Nanotechnology 4, 218 (1993).
10. T. Itoh and T. Suga, Sensors Actuators A 43, 305 (1994).
11. T. Itoh and T. Suga, J. Vac. Sci. Technol. B 12, 1581 (1994).
12. T. Itoh, T. Ohashi, and T. Suga, IEICE Trans Electron. E78-C, 146 (1995).
13. C. Lee, T. Itoh, G. Sasaki, K. Mizuishi, and T. Suga, in Proceedings of the IUMRS International Conference on Electronic Materials (MRS-Taiwan, Hsinchu, Taiwan, 1994), Vol. 3, p. 21.
14. T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
15. C. V. Herr, Statistical Mechanics, Kinetic Theory, and Stochastic Processes (Academic, New York, 1972).
16. T. Itoh and T. Suga, J. Micromech. Microeng, 5, 231 (1995).