A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2007, Pages 725-727

  Herdier, Romain ^a,b   Jenkins, David ^c   Remiens, Denis ^a   Dupont, M ^b   Osmont, D ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b ONERA   (France)

^c UNIVERSITY OF PLYMOUTH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; TECHNICAL PRESENTATIONS; THICK FILMS;

INTERNATIONAL SYMPOSIUM; LEAD ZIRCONATE-TITANATE; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC THIN FILMS;

PIEZOELECTRICITY;

EID: 51349086463     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2007.4393383     Document Type: Conference Paper

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