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Applied Surface Science

Volumn 258, Issue 15, 2012, Pages 5628-5637

Metal-assisted electroless etching of silicon in aqueous NH 4 HF 2 solution

(3) Brahiti, Naima a Bouanik, Sihem Aissiou b Hadjersi, Toufik b

a UNIVERSITY OF BOUMERDES (Algeria)

b L'Unite de Developpement de la Technologie du Silicium (Algeria)

Author keywords

Catalyst; Metal assisted electroless etching; Silicon nanostructures; Silicon nanowires

Indexed keywords

CATALYSTS; NANOWIRES; PH; PRECIOUS METALS; SILICON; SUBSTRATES;

CHEMICAL DEPOSITION; ELECTROLESS CHEMICAL ETCHING; ELECTROLESS ETCHINGS; ETCHING PARAMETERS; ETCHING TEMPERATURE; SILICON NANO STRUCTURES; SILICON NANOWIRES; SILICON SUBSTRATES;

ETCHING;

EID: 84859157027 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.043 Document Type: Article

Times cited : (34)

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