An evolutionary approach for robust layout synthesis of MEMS

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 2, Issue , 2005, Pages 1186-1191

  Fan, Z ^a,b   Wang, J ^a,c   Goodman, E ^a,d  

^a IEEE   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

^d Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRIC UNCERTAINTIES; LAYOUT SYNTHESIS; MULTI-OBJECTIVE GENETIC ALGORITHMS (MOGA);

ALGORITHMS; COMPUTATIONAL METHODS; ERROR ANALYSIS; GEOMETRY; OPTIMIZATION; PRODUCT DESIGN; RESONATORS; ROBUSTNESS (CONTROL SYSTEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 27644453175     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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