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Volumn 520, Issue 11, 2012, Pages 4074-4079
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Microstructural evolution in nanostructured gold films
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Author keywords
Gold; Grain growth; Nanostructured films; Sputter coater; Thin films
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Indexed keywords
AU FILM;
BASE PRESSURE;
DC SPUTTERING;
DYNAMIC SCALING;
FILM STRUCTURE;
FITTED VALUES;
MEAN-GRAIN SIZE;
NANO GRAINS;
NANOSTRUCTURED FILMS;
NANOSTRUCTURED GOLD;
POWER LAW;
POWER-LAW DEPENDENCES;
ROOM TEMPERATURE;
SPUTTER COATER;
VACUUM CHAMBERS;
GOLD COATINGS;
GRAIN BOUNDARIES;
GRAIN GROWTH;
MICROSTRUCTURAL EVOLUTION;
SCANNING TUNNELING MICROSCOPY;
SILICON COMPOUNDS;
SURFACE ROUGHNESS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
GOLD;
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EID: 84858334925
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2012.01.010 Document Type: Article |
Times cited : (17)
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References (29)
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