Study on texture evolution and properties of silver thin films prepared by sputtering deposition

Applied Surface Science

Volumn 221, Issue 1-4, 2004, Pages 281-287

  Jung, Yeon Sik ^a  

^a Samsung Corning Co Ltd   (South Korea)

Author keywords

Electrical properties; Optical properties; Silver; Sputtering; Texture; XRD

Indexed keywords

COMPUTER SIMULATION; CRYSTALLOGRAPHY; ELECTRIC PROPERTIES; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

POLYCRYSTALLINE THIN FILMS; SILVER THIN FILMS;

SILVER;

EID: 0345603152     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00888-2     Document Type: Article

References (14)

1. Dong L., Srolovitz D.J. J. Appl. Phys. 84:1998;5261.
2. Chiu K.F., Barber Z.H. Thin Solid Films. 358:2000;264.
3. S. Mader, Handbook of Thin Film Technology, McGraw-Hill, New York, 1970.
4. M.B. Stearns, C.H. Lee, C.-H. Chang, A.K. Petford-Long, Metallic Multilayers and Epitaxy, TMS, Pennsylvania, 1988.
5. Li T.Q., Noda S., Tsuji Y., Ohsawa T., Komiyama H. J. Vac. Sci. Technol. A. 20:2002;583.
6. Karpenko O., Bilello J.C., Yalisove S.M. J. Appl. Phys. 82:1997;1397.
7. Bradley R.M., Harper J.M.E., Smith D.A. J. Appl. Phys. 60:1986;4160.
8. Kim Y.-W., Moser J., Petrov I., Greene J.E. J. Vac. Sci. Technol. A. 12:1994;3169.
9. Yu L.S., Harper J.M.E., Cuomo J.J., Smith D.A. Appl. Phys. Lett. 47:1985;932.
10. Pelleg J., Zevin L.Z., Lungo S. Thin Solid Films. 197:1991;117.
11. Banerjee R., Chandra R., Ayyub P. Thin Solid Films. 405:2002;64.
12. Green J.E., Sundgren J.-F., Hultman L., Petrov I., Bergstrom D.B. Appl. Phys. Lett. 67:1995;2928.
13. M. Ohring, The Materials Science of Thin Films, Academic Press, San Diego, 1992.
14. Thornton J.A. Rev. Mater. Sci. 7:1977;239.