Surface roughness and resistivity of Au film on Si-(1 1 1) substrate

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 445-450

  Tang, Wu ^a   Xu, Kewei ^a   Wang, Ping ^b   Li, Xian ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b Xi'an Institute of Space Radio Technology   (China)

Author keywords

Au films; Resistivity; Si substrate; Surface roughness

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; METALLIC FILMS; MICROWAVE INTEGRATED CIRCUITS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

ADHESION LAYERS;

SILICON;

EID: 0037391926     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00909-7     Document Type: Conference Paper

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