메뉴 건너뛰기




Volumn 130, Issue 1, 2011, Pages 73-83

Effect of annealing on ferroelectric properties of lanthanum modified lead zirconate titanate thin films

Author keywords

Doping; Ferroelectric film; La; leakage current; PLZT

Indexed keywords

ANNEALING PROCESS; CHEMICAL FORMULAE; CRYSTALLINITIES; FERROELECTRIC PROPERTY; FERROELECTRIC TESTERS; LANTHANUM-MODIFIED LEAD ZIRCONATE TITANATE; LOW-LEAKAGE CURRENT; METAL ORGANIC DECOMPOSITION TECHNIQUES; PHOTOVOLTAIC DEVICES; PHOTOVOLTAIC RESPONSE; PLZT; PLZT FILMS; POST DEPOSITION ANNEALING; RAPID ANNEALING; SPIN-COATING METHOD; STRUCTURE AND MORPHOLOGY; TEMPERATURE RANGE;

EID: 84857805275     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584587.2011.637011     Document Type: Article
Times cited : (10)

References (33)
  • 1
    • 0001091881 scopus 로고    scopus 로고
    • Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films
    • T. Haccart, E. Cattan, D. Remiens, S. Hiboux, and P.Muralt, Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films. Appl. Phys. Lett. 76, 3292-3294 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 3292-3294
    • Haccart, T.1    Cattan, E.2    Remiens, D.3    Hiboux, S.4    Muralt, P.5
  • 2
    • 1142304492 scopus 로고    scopus 로고
    • Effects of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate titanate films
    • K. W. Kwok, R. C. W. Tsang, H. L. W. Chan, and C. L. Choy, Effects of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate titanate films. J. Appl Phys. 95, 1372-1376 (2004).
    • (2004) J. Appl Phys. , vol.95 , pp. 1372-1376
    • Kwok, K.W.1    Tsang, R.C.W.2    Chan, H.L.W.3    Choy, C.L.4
  • 4
    • 33745737039 scopus 로고    scopus 로고
    • Preparation and piezoelectric properties of sol-gel-derived Nb-doped PZT films for MEMS applications
    • DOI 10.1080/10584580600657377, PII R5167615203V4018
    • K. W. K. K. P. Kwok, R. C. W. Tsang, H. L. W. Chan, and C. L. Choy, Preparation and piezoelectric properties of sol-gel-derived Nb-doped PZT films for MEMS applications. Integrated Ferroelectrics 80, 155-162 (2006). (Pubitemid 44014007)
    • (2006) Integrated Ferroelectrics , vol.80 , Issue.1 , pp. 155-162
    • Kwok, K.W.1    Kwok, K.P.2    Tsang, R.C.W.3    Chan, H.L.W.4    Choy, C.L.5
  • 5
    • 0032679818 scopus 로고    scopus 로고
    • Ferroelectric ceramics: History and technology
    • G. H. Haertling, Ferroelectric ceramics: History and technology. J. Am. Ceram. Soc. 82, 797-818 (1999).
    • (1999) J. Am. Ceram. Soc. , vol.82 , pp. 797-818
    • Haertling, G.H.1
  • 6
    • 0020766351 scopus 로고
    • Polarization and depolarization behavior of hot pressed lead lanthanum zirconate titanate ceramics
    • Y. Xi, C. Zhili, and L. E. Cross, Polarization and depolarization behavior of hot pressed lead lanthanum zirconate titanate ceramics. J. Appl. Phys. 54, 3399-3404 (1983).
    • (1983) J. Appl. Phys. , vol.54 , pp. 3399-3404
    • Xi, Y.1    Zhili, C.2    Cross, L.E.3
  • 8
    • 21544435221 scopus 로고
    • Photoinduced hysteresis changes and optical storage in (Pb,La)(Zr,Ti)O3 thin films and ceramics
    • D. Dimos, W. L. Warren, M. B. Sinclair, B. A. Tuttle, and R. W. Schwartz, Photoinduced hysteresis changes and optical storage in (Pb,La)(Zr,Ti)O3 thin films and ceramics. J. Appl. Phys. 76, 4305-4315 (1994).
    • (1994) J. Appl. Phys. , vol.76 , pp. 4305-4315
    • Dimos, D.1    Warren, W.L.2    Sinclair, M.B.3    Tuttle, B.A.4    Schwartz, R.W.5
  • 10
    • 34547855169 scopus 로고    scopus 로고
    • Electro-optic properties of lanthanum-modified lead zirconate titanate thin films epitaxially grown by the advanced sol-gel method
    • DOI 10.1143/JJAP.46.L244
    • K. Uchiyama, A. Kasamatsu, Y. Otani, and T. Shiosaki, Electro-optic properties of lanthanum modified lead zirconate titanate thin films epitaxially grown by the advanced sol gel method. Jpn. J. Appl. Phys. 46, L244-L246 (2007). (Pubitemid 47260382)
    • (2007) Japanese Journal of Applied Physics, Part 2: Letters , vol.46 , Issue.8-11
    • Uchiyama, K.1    Kasamatsu, A.2    Otani, Y.3    Shiosaki, T.4
  • 11
    • 55149089284 scopus 로고    scopus 로고
    • Electrooptic and piezoelectric properties of (Pb,La)(Zr,Ti)O3 films with various Zr/Ti ratios
    • H. Shima, T. Iijima, H. Funakubo, T. Nakajima, H. Naganuma, and S. Okamura, Electrooptic and piezoelectric properties of (Pb,La)(Zr,Ti)O3 films with various Zr/Ti ratios. Jpn. J. Appl. Phys. 47, 7541-7544 (2008).
    • (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 7541-7544
    • Shima, H.1    Iijima, T.2    Funakubo, H.3    Nakajima, T.4    Naganuma, H.5    Okamura, S.6
  • 13
    • 0001643389 scopus 로고
    • Photostrictive actuator using PLZT ceramics
    • K. Uchino and M. Aizawa, Photostrictive actuator using PLZT ceramics. Jpn. J. Appl. Phys. 24S3, 139-141 (1985).
    • (1985) Jpn. J. Appl. Phys. 24S3 , pp. 139-141
    • Uchino, K.1    Aizawa, M.2
  • 14
    • 77950502077 scopus 로고    scopus 로고
    • Solar energy: Ferroelectric photovoltaics
    • H. T. Huang, Solar energy: Ferroelectric photovoltaics. Nature Photonics 4, 134-135 (2010).
    • (2010) Nature Photonics , vol.4 , pp. 134-135
    • Huang, H.T.1
  • 15
    • 52949092378 scopus 로고    scopus 로고
    • High efficient photovoltaics in nanoscaled ferroelectric thin films
    • M. Qin, K. Yao, and Y. C. Liang, High efficient photovoltaics in nanoscaled ferroelectric thin films. Appl. Phys.Lett. 93, 122904-122903 (2008).
    • (2008) Appl. Phys.Lett. , vol.93 , pp. 122904-122903
    • Qin, M.1    Yao, K.2    Liang, Y.C.3
  • 19
    • 0342572625 scopus 로고    scopus 로고
    • Influence of composition and dopant on photostriction in lanthanum-modified lead zirconate titanate ceramics
    • P. Poosanaas, K. Tonooka, I. R. Abothu, S. Komarneni, and K. Uchino, Influence of composition and dopant on photostriction in lanthanum-modified lead zirconate titanate ceramics. J. Intelligent and Smart Mat. 10, 439-445 (1999).
    • (1999) J. Intelligent and Smart Mat. , vol.10 , pp. 439-445
    • Poosanaas, P.1    Tonooka, K.2    Abothu, I.R.3    Komarneni, S.4    Uchino, K.5
  • 20
    • 0038757517 scopus 로고    scopus 로고
    • Leakage current mechanisms in lead-based thin-film ferroelectric capacitors
    • B. Nagaraj, S. Aggarwal, T. K. Song, T. Sawhney, and R. Ramesh, Leakage current mechanisms in lead-based thin-film ferroelectric capacitors. Physical Review B 59, 16022-16027 (1999).
    • (1999) Physical Review B , vol.59 , pp. 16022-16027
    • Nagaraj, B.1    Aggarwal, S.2    Song, T.K.3    Sawhney, T.4    Ramesh, R.5
  • 21
    • 0019009828 scopus 로고
    • EPITAXIAL GROWTH OF FERROELECTRIC PLZT THIN FILM AND THEIR OPTICAL PROPERTIES.
    • M. Okuyama, T. Usuki, Y. Hamakawa, and T. Nakagawa, Epitaxial growth of ferroelectric PLZT thin film and their optical properties. Appl. Phys. Lett. 21, 339-343 (1980). (Pubitemid 10487482)
    • (1980) Applied physics Berlin , vol.21 , Issue.4 , pp. 339-343
    • Okuyama, M.1    Usuki, T.2    Hamakawa, Y.3    Nakagawa, T.4
  • 22
    • 0002044275 scopus 로고    scopus 로고
    • Electron beam deposited lead-lanthanum-zirconate-titanate thin films for silicon based device applications
    • B. Panda, S. K. Ray, A. Dhar, A. Sarkar, D. Bhattacharya, and K. L. Chopra, Electron beam deposited lead lanthanum zirconate titanate thin films for silicon based device applications. J. Appl. Phys. 79, 1008-1012 (1996). (Pubitemid 126571729)
    • (1996) Journal of Applied Physics , vol.79 , Issue.2 , pp. 1008-1012
    • Panda, B.1    Ray, S.K.2    Dhar, A.3    Sarkar, A.4    Bhattacharya, D.5    Chopra, K.L.6
  • 23
    • 0028510865 scopus 로고
    • Sol-gel processing of electrical and magnetic ceramics
    • C. D. E. Lakeman and D. A. Payne, Sol-gel processing of electrical and magnetic ceramics. Mater. Chem. Phys. 38, 305-324 (1994).
    • (1994) Mater. Chem. Phys. , vol.38 , pp. 305-324
    • Lakeman, C.D.E.1    Payne, D.A.2
  • 24
    • 0005068995 scopus 로고
    • Comparative Sol gel processing of PZT thin films
    • M. Sayer, G. Yi, and M. Sedlar, Comparative Sol gel processing of PZT thin films. Integrated Ferroelectrics 7, 247-258 (1995).
    • (1995) Integrated Ferroelectrics , vol.7 , pp. 247-258
    • Sayer, M.1    Yi, G.2    Sedlar, M.3
  • 25
  • 27
    • 67650714643 scopus 로고    scopus 로고
    • Photovoltaic mechanisms in ferroelectric thin films with the effects of the electrodes and interfaces
    • M. Qin, K. Yao, and Y. C. Liang, Photovoltaic mechanisms in ferroelectric thin films with the effects of the electrodes and interfaces. Appl. Phys. Lett. 95, 022912-022913 (2009).
    • (2009) Appl. Phys. Lett. , vol.95 , pp. 022912-022913
    • Qin, M.1    Yao, K.2    Liang, Y.C.3
  • 28
    • 63749098928 scopus 로고    scopus 로고
    • 0.48)O3 ferroelectric thin films sandwiched between different top and bottom electrodes
    • 0.48)O3 ferroelectric thin films sandwiched between different top and bottom electrodes. J. Appl. Phys. 105, 061624-061631 (2009).
    • (2009) J. Appl. Phys. , vol.105 , pp. 061624-061631
    • Qin, M.1    Yao, K.2    Liang, Y.C.3
  • 30
    • 0032734307 scopus 로고    scopus 로고
    • Effect of annealing conditions on the leakage current characteristics of ferroelectric PZT thin films grown by sol-gel process
    • S. M. Cho and D. Y. Jeon, Effect of annealing conditions on the leakage current characteristics of ferroelectric PZT thin films grown by sol-gel process. Thin Solid Films 338, 149-154 (1999).
    • (1999) Thin Solid Films , vol.338 , pp. 149-154
    • Cho, S.M.1    Jeon, D.Y.2
  • 31
    • 0035876538 scopus 로고    scopus 로고
    • 3 thin films. The effects of lanthanum content and bottom electrodes
    • DOI 10.1016/S0040-6090(01)00871-9, PII S0040609001008719
    • 0.48)1-x/4O3 thin films. The effects of lanthanum content and bottom electrodes. Thin Solid Films 389, 99-107 (2001). (Pubitemid 32518274)
    • (2001) Thin Solid Films , vol.389 , Issue.1-2 , pp. 99-107
    • Es-Souni, M.1    Abed, M.2    Piorra, A.3    Malinowski, S.4    Zaporojtchenko, V.5
  • 32
    • 0028135817 scopus 로고
    • Electrical transport and dielectric breakdown in Pb(Zr,Ti)O3 thin films
    • X. Chen, A. I. Kingon, H. Al-Shreef, and K. R. Bellur, Electrical transport and dielectric breakdown in Pb(Zr,Ti)O3 thin films. Ferroelectrics 151, 133-138 (1994).
    • (1994) Ferroelectrics , vol.151 , pp. 133-138
    • Chen, X.1    Kingon, A.I.2    Al-Shreef, H.3    Bellur, K.R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.