-
2
-
-
0034228288
-
PZT thin films for microsensors and actuators: Where do we stand?
-
P. Muralt, PZT thin films for microsensors and actuators: Where do we stand? IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 47, 903-915 (2000).
-
(2000)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.47
, pp. 903-915
-
-
Muralt, P.1
-
3
-
-
70349696211
-
Piezoelectric thin films for sensors, actuators, and energy harvesting
-
P. Muralt, R. G. Polcawich, and S. Trolier-McKinstry, Piezoelectric thin films for sensors, actuators, and energy harvesting. MRS Bulletin 34, 658-664 (2009).
-
(2009)
MRS Bulletin
, vol.34
, pp. 658-664
-
-
Muralt, P.1
Polcawich, R.G.2
Trolier-McKinstry, S.3
-
4
-
-
3142669787
-
Piezoelectric microactuator devices
-
R. Maeda, J. J. Tsaur, S. H. Lee, and M. Ichiki, Piezoelectric microactuator devices. J. Electroceramics 12, 89-100 (2004).
-
(2004)
J. Electroceramics
, vol.12
, pp. 89-100
-
-
Maeda, R.1
Tsaur, J.J.2
Lee, S.H.3
Ichiki, M.4
-
5
-
-
0042388262
-
Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers
-
L. -P.Wang, R. A.Wolf, Jr., Y.Wang, K. K. Deng, L. Zou, R. J. Davis, and S. Trolier-McKinstry, Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers. J. Microelectromech, Syst. 12, 433-439 (2003).
-
(2003)
J. Microelectromech, Syst.
, vol.12
, pp. 433-439
-
-
Wang, L.-P.1
Wolf Jr., R.A.2
Wang, Y.3
Deng, K.K.4
Zou, L.5
Davis, R.J.6
Trolier-McKinstry, S.7
-
6
-
-
0029304253
-
Fabrication and characterization of PZT thin-film vibrators for micromotors
-
P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, N. Setter, and R. Luthier, Fabrication and characterization of PZT thin-film vibrators for micromotors. Sensors and Actuators A 48, 157-165 (1995).
-
(1995)
Sensors and Actuators A
, vol.48
, pp. 157-165
-
-
Muralt, P.1
Kohli, M.2
Maeder, T.3
Kholkin, A.4
Brooks, K.5
Setter, N.6
Luthier, R.7
-
7
-
-
40649103149
-
Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications
-
E. Fujii, R. Takayama, K. Nomura, A. Murata, T. Hirasawa, A. Tomozawa, S. Fujii, T. Kamada, and H. Torii, Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 54, 2431 (2007).
-
(2007)
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
, vol.54
, pp. 2431
-
-
Fujii, E.1
Takayama, R.2
Nomura, K.3
Murata, A.4
Hirasawa, T.5
Tomozawa, A.6
Fujii, S.7
Kamada, T.8
Torii, H.9
-
8
-
-
0030865473
-
A novel micropump design with thick-film piezoelectric actuation
-
PII S0957023397769571
-
M. Koch, N. Harris, R. Mass, A. G. R. Evans, N. M. White, and A. Brunnschweiler, A novel micropump design with thick-film piezoelectric actuator. Measurement Science and Techn. 8, 49-57 (1997). (Pubitemid 127557995)
-
(1997)
Measurement Science and Technology
, vol.8
, Issue.1
, pp. 49-57
-
-
Koch, M.1
Harris, N.2
Maas, R.3
Evans, A.G.R.4
White, N.M.5
Brunnschweiler, A.6
-
9
-
-
0042842361
-
Lead-zirconatetitanate-based piezoelectric micromachined switch
-
S. J. Cross, S. Tadigadapa, T. N. Jackson, S. Trolier-McKinstry and Q. Q. Zhang, Lead-zirconatetitanate-based piezoelectric micromachined switch. Appl. Phys. Lett. 83, 174-176 (2003).
-
(2003)
Appl. Phys. Lett.
, vol.83
, pp. 174-176
-
-
Cross, S.J.1
Tadigadapa, S.2
Jackson, T.N.3
Trolier-McKinstry, S.4
Zhang, Q.Q.5
-
10
-
-
65949108035
-
PZT MEMS actuated flapping wings for insect-inspired robotics
-
J. R. Bronson, J. S. Pulskamp, R. G. Polcawich, C. M. Kroninger, and E. D.Wetzel, PZT MEMS actuated flapping wings for insect-inspired robotics. Proc. IEEE MEMS 1047-1050 (2009).
-
(2009)
Proc. IEEE MEMS
, pp. 1047-1050
-
-
Bronson, J.R.1
Pulskamp, J.S.2
Polcawich, R.G.3
Kroninger, C.M.4
Wetzel, E.D.5
-
11
-
-
0037899581
-
1-x)O3 thin films for MEMS: Integration, deposition and properties
-
1-x)O3 thin films for MEMS: Integration, deposition and properties. Sensors and Actuators A 105, 162-170 (2003).
-
(2003)
Sensors and Actuators A
, vol.105
, pp. 162-170
-
-
Ledermann, N.1
Muralt, P.2
Baborowski, J.3
Gentil, S.4
Mukati, K.5
Cantoni, M.6
Seifert, A.7
Setter, N.8
-
12
-
-
0001091881
-
Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films
-
T. Haccart, E. Cattan, D. Remiens, S. Hiboux, and P.Muralt, Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films. Appl. Phys. Lett. 76, 3292-3294 (2000).
-
(2000)
Appl. Phys. Lett.
, vol.76
, pp. 3292-3294
-
-
Haccart, T.1
Cattan, E.2
Remiens, D.3
Hiboux, S.4
Muralt, P.5
-
13
-
-
0037439584
-
Substitution ofNb doping on the structural, microstructural and electrical properties in PZT films
-
T. Haccart, D. Remiens, and E.Cattan, Substitution ofNb doping on the structural, microstructural and electrical properties in PZT films. Thin Solid Films 423, 235-242 (2003).
-
(2003)
Thin Solid Films
, vol.423
, pp. 235-242
-
-
Haccart, T.1
Remiens, D.2
Cattan, E.3
-
14
-
-
1142304492
-
Effect of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate films
-
K. W. Kwok, R. C. W. Tsang, H. L. W. Chan, and C. L. Choy, Effect of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate films. J. Appl. Phys. 95, 1372-1376 (2004).
-
(2004)
J. Appl. Phys.
, vol.95
, pp. 1372-1376
-
-
Kwok, K.W.1
Tsang, R.C.W.2
Chan, H.L.W.3
Choy, C.L.4
-
15
-
-
33745737039
-
Preparation and piezoelectric properties of sol-gel-derived Nb-doped PZT films for MEMS applications
-
DOI 10.1080/10584580600657377, PII R5167615203V4018
-
K. W. Kwok, K. P. Kwok, R. C. W. Tsang, H. L. W. Chan, and C. L. Choy, Preparation and piezoelectric properties of sol-gel-derived Nb-doped PZT films for MEMS applications. Integrated Ferroelectrics 80, 155-162 (2006). (Pubitemid 44014007)
-
(2006)
Integrated Ferroelectrics
, vol.80
, Issue.1
, pp. 155-162
-
-
Kwok, K.W.1
Kwok, K.P.2
Tsang, R.C.W.3
Chan, H.L.W.4
Choy, C.L.5
-
16
-
-
0022223880
-
3, PZT, and PLZT thin films
-
3, PZT, and PLZT thin films. Br. Ceram. Proc. 36, 107-121 (1985). (Pubitemid 17491276)
-
(1985)
British Ceramic Proceedings
, Issue.36
, pp. 107-121
-
-
Budd, K.D.1
Dey, S.K.2
Payne, D.A.3
-
20
-
-
0141921865
-
Effect of niobium modifications to PZT (53/47) thin films made by a sol-gel route
-
R. Kurchania and S. J. Milne, Effect of niobium modifications to PZT (53/47) thin films made by a sol-gel route. J. Sol-gel Science and Technology 28, 143-150 (2003).
-
(2003)
J. Sol-gel Science and Technology
, vol.28
, pp. 143-150
-
-
Kurchania, R.1
Milne, S.J.2
-
21
-
-
0029322266
-
Effect of Nb doping on the microstructure of sol-gel-derived PZT thin films
-
R. D. Klissurska, K. G. Brooks, I. M. Reaney, C. Pawlaczyk, M. Kosec, and N. Setter, Effect of Nb doping on the microstructure of sol-gel-derived PZT thin films. J. Am. Ceram. Soc. 78, 1513-1520 (1995).
-
(1995)
J. Am. Ceram. Soc.
, vol.78
, pp. 1513-1520
-
-
Klissurska, R.D.1
Brooks, K.G.2
Reaney, I.M.3
Pawlaczyk, C.4
Kosec, M.5
Setter, N.6
-
22
-
-
4644338629
-
The effect of Nb doping on ferroelectric properties of PZT thin films prepared from polymeric precursors
-
E. C. F. Souza, A. Z. Simoes, M. Cilense, E. Longo, and J. A. Varela, The effect of Nb doping on ferroelectric properties of PZT thin films prepared from polymeric precursors. Mater. Chem. Phys. 88, 155-159 (2004).
-
(2004)
Mater. Chem. Phys.
, vol.88
, pp. 155-159
-
-
Souza, E.C.F.1
Simoes, A.Z.2
Cilense, M.3
Longo, E.4
Varela, J.A.5
|