Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 12, 2011, Pages 2659-2667

  Zahorian, Jaime ^a   Hochman, Michael ^b   Xu, Toby ^b   Satir, Sarp ^a   Gurun, Gokce ^a   Karaman, Mustafa ^c   Degertekin, F Levent ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c ISIK UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

A-CENTER; ASSOCIATED ELECTRONICS; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CMOS RECEIVERS; DUAL-RING; ETCHING STEP; INTRAVASCULAR IMAGING; INTRAVASCULAR ULTRASOUND; LOW TEMPERATURES; MECHANICAL PLANARIZATION; MICROMACHINING PROCESS; PARASITIC CAPACITANCE; PERFORMANCE EVALUATION; RECEIVE MODE; SILICON AREA; SINGLE-MASK; VOLUMETRIC IMAGING; WIREBONDING;

CMOS INTEGRATED CIRCUITS; EXPERIMENTS; FABRICATION; FREQUENCY RESPONSE; INTEGRATION; SILICON WAFERS; SURFACE TOPOGRAPHY; ULTRASONICS;

ULTRASONIC TRANSDUCERS;

ARTICLE; ELECTRONICS; ENDOSCOPIC ECHOGRAPHY; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; IMAGE ENHANCEMENT; MICROELECTROMECHANICAL SYSTEM; REPRODUCIBILITY; SEMICONDUCTOR; SENSITIVITY AND SPECIFICITY; SYSTEM ANALYSIS; TRANSDUCER;

ELECTRONICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; IMAGE ENHANCEMENT; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SEMICONDUCTORS; SENSITIVITY AND SPECIFICITY; SYSTEMS INTEGRATION; TRANSDUCERS; ULTRASONOGRAPHY, INTERVENTIONAL;

EID: 84856980894     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.2128     Document Type: Article

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