Single chip CMUT arrays with integrated CMOS electronics: Fabrication process development and experimental results

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 386-389

  Zahorian, Jaime ^a   Guldiken, Rasim ^b   Gurun, Gokce ^c   Qureshi, Muhammad Shakeel ^c   Balantekin, Mujdat ^a   Hasler, Paul ^c   Degertekin, F Levent ^a,c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of South Florida   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CMOS; CMUT; Fabrication; IVUS; Micromachined

Indexed keywords

ASSOCIATED ELECTRONICS; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CATHETER-BASED IMAGING; CMOS; CMUT; ETCHING STEP; FABRICATION PROCESS; ISOLATION OXIDES; IVUS; LOW TEMPERATURES; MICROMACHINED; MICROMACHINING PROCESS; PARASITIC CAPACITANCE; PULSE ECHOES; SINGLE CHIPS; TRANSDUCER SENSITIVITY; ULTRASOUND IMAGING;

ELECTROACOUSTIC TRANSDUCERS; FABRICATION; MICROMACHINING; OPTICAL INTERCONNECTS; PIEZOELECTRIC TRANSDUCERS; PLASMA ETCHING; SIGNAL TO NOISE RATIO; ULTRASONIC IMAGING; ULTRASONICS;

ULTRASONIC TRANSDUCERS;

EID: 67649335392     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0095     Document Type: Conference Paper

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