Decoupling sensor morphology and material: Atomic layer deposition onto nanocolumn scaffolds

Sensors and Actuators, B: Chemical

Volumn 162, Issue 1, 2012, Pages 1-6

  Taschuk, M T ^a   Harris, K D ^b   Smetaniuk, D P ^a   Brett, M J ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Atomic layer deposition; Glancing angle deposition; Relative humidity; Sensors; Si; SiO 2; TiO 2

Indexed keywords

ACTIVE SENSING; CONFORMAL COATINGS; DEGREE OF FREEDOM; GLANCING ANGLE DEPOSITION; HUMIDITY SENSING; NANO-STRUCTURED; NANOCOLUMN; NANOSCALE MORPHOLOGY; PHOTO-CATALYTIC; RELATIVE HUMIDITIES; RESPONSIVITY; SENSOR MORPHOLOGY; SIO 2; SUBNANOMETERS; SURFACE FUNCTIONALITIES; TIO; WATER CONTACT ANGLE;

ATOMIC LAYER DEPOSITION; CONTACT ANGLE; HUMIDITY SENSORS; MORPHOLOGY; SCAFFOLDS; SCAFFOLDS (BIOLOGY); SENSORS; SILICON; SILICON COMPOUNDS;

TITANIUM DIOXIDE;

EID: 84856697960     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.08.024     Document Type: Article

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