Reactive ion etching of columnar nanostructured TiO2 thin films for modified relative humidity sensor response time

IEEE Sensors Journal

Volumn 9, Issue 12, 2009, Pages 1979-1986

  Kupsta, Martin R ^a   Taschuk, Michael T ^a   Brett, Michael J ^a,b   Sit, Jeremy C ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition (GLAD); Humidity; Nanostructured; Porous; Reactive ion etching; Sensor; Thin film; Titanium dioxide

Indexed keywords

GLANCING ANGLE DEPOSITION; HUMIDITY; NANO-STRUCTURED; POROUS; REACTIVE ION;

ADSORPTION; ATMOSPHERIC HUMIDITY; DEPOSITION; DESORPTION; HYSTERESIS; IONS; OXIDES; SENSORS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; VAPOR DEPOSITION;

REACTIVE ION ETCHING;

EID: 78651255012     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2032413     Document Type: Article

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