Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing

Microsystem Technologies

Volumn 17, Issue 3, 2011, Pages 351-359

  Zheng, Qinglong ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; BIO-CHEMICAL APPLICATIONS; BIOCHEMICAL SENSING; CANTILEVER SENSORS; DESIGN AND OPTIMIZATION; DESIGN GUIDELINES; DESIGN OPTIMIZATION; FINITE ELEMENT SIMULATIONS; NANO-MECHANICAL CANTILEVER; PARYLENES; PIEZO-RESISTORS; POLYMER CANTILEVERS; SINGLE CRYSTAL SILICON; SURFACE STRESS SENSING;

COMPUTER SIMULATION; DESIGN; FINITE ELEMENT METHOD; INTEGRATION; MATHEMATICAL MODELS; MODELS; OPTIMIZATION; POLYCRYSTALS; SURFACES;

NANOCANTILEVERS;

EID: 84856254843     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1275-1     Document Type: Article

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