Parylene cantilevers integrated with polycrystalline silicon piezoresistors for surface stress sensing

Applied Physics Letters

Volumn 91, Issue 8, 2007, Pages

  Katragadda, Rakesh ^a   Wang, Zhuo ^a   Khalid, Waqas ^a   Li, Yuefa ^a   Xu, Yong ^a  

^a Wayne State University

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; POLYSILICON; RESISTORS; STRESS ANALYSIS; VAPORS;

BIOLOGICAL MOLECULES; OCTANETHIOL VAPORS; PIEZORESISTORS; SURFACE STRESS SENSING;

CANTILEVER BEAMS;

EID: 34548208319     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2772189     Document Type: Article

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