Biosensor-compatible encapsulation for pre-functionalized nanofluidic channels using asymmetric plasma treatment

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 805-810

  Leichlé, Thierry ^a,e   Lin, Yii Lih ^a,b   Chiang, Po Chieh ^a   Hu, Su Ming ^a   Liao, Kuo Tang ^a,f   Chou, Chia Fu ^a,c,d  

^a INSTITUTE OF PHYSICS   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c GENOMICS RESEARCH CENTER   (Taiwan)

^d RESEARCH CENTER FOR APPLIED SCIENCES   (Taiwan)

^e UNIVERSITÉ DE TOULOUSE   (France)

^f University of Virginia   (United States)

Author keywords

Biosensor; Chip bonding; Functionalization; Nanofluidics; Polysilsesquioxane (PSQ); Sealing

Indexed keywords

BIOSENSING CAPABILITY; BIOSENSING PLATFORMS; BONDING PROCESS; BRCA1 GENE; BREAST CANCER; CHIP BONDING; CHIP SURFACES; FLUORESCENCE IMAGING; FUNCTIONAL BIOSENSORS; FUNCTIONALIZATION; GLASS CHIPS; KEY FEATURE; NANO CHANNELS; NANO-FLUIDIC DEVICES; NANOFLUIDIC CHANNEL; NANOSLITS; OXYGEN PLASMA TREATMENTS; OXYGEN PLASMAS; PLASMA TREATMENT; POLYSILSESQUIOXANES; ROOM TEMPERATURE; SEALING PROCESS; SELECTIVE SURFACE MODIFICATION; SILANOL GROUPS; VIABLE SOLUTIONS;

BIOSENSORS; GENES; MEDICAL IMAGING; OLIGONUCLEOTIDES; OXYGEN; PLASMA APPLICATIONS; PLASMAS; SEALING (FINISHING);

NANOFLUIDICS;

EID: 84856233023     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.11.036     Document Type: Article

References (27)

1. H. Becker Hype, hope and hubris: the quest for the killer application in microfluidics Lab Chip 9 2009 2119 2122
2. P. Yager, T. Edwards, E. Fu, K. Helton, K. Nelson, M.R. Tam, and B.H. Weigl Microfluidic diagnostic technologies for global public health Nature 442 2006 412 418 (Pubitemid 44264785)
3. R.B. Schoch, L.F. Cheow, and J. Han Electrical detection of fast reaction kinetics in nanochannels with an induced flow Nano Lett. 7 2007 3895 3900
4. J.C.T. Eijkel, and A.v.d. Berg Nanofluidics: what is it and what can we expect from it? Microfluid. Nanofluid. 1 2005 249 267 (Pubitemid 40997427)
5. H. Craighead Future lab-on-a-chip technologies for interrogating individual molecules Nature 442 2006 387 393 (Pubitemid 44264782)
6. R.B. Schoch, J. Han, and P. Renaud Transport phenomena in nanofluidics Rev. Mod. Phys. 80 2008 839
7. Q. Xia, K.J. Morton, R.H. Austin, and S.Y. Chou Sub-10 nm self-enclosed self-limited nanofluidic channel arrays Nano Lett. 8 2008 3830 3833
8. Y.H. Cho Fabrication of silicon dioxide submicron channels without nanolithography for single biomolecule detection Nanotechnology 18 2007 465303
9. C. Lee, E.-H. Yang, N.V. Myung, and T. George A nanochannel fabrication technique without nanolithography Nano Lett. 3 2003 1339 1340 (Pubitemid 37346970)
10. H. Cao, Z.N. Yu, J. Wang, J.O. Tegenfeldt, R.H. Austin, E. Chen, W. Wu, and S.Y. Chou Fabrication of 10 nm enclosed nanofluidic channels Appl. Phys. Lett. 81 2002 174 176
11. P. Abgrall, L.-N. Low, and N.-T. Nguyen Fabrication of planar nanofluidic channels in a thermoplastic by hot-embossing and thermal bonding Lab Chip 7 2007 520 522 (Pubitemid 46496549)
12. B. Yang, and S.W. Pang Multiple level nanochannels fabricated using reversal UV nanoimprint J. Vac. Sci. Technol. B 24 2006 2984 2987 (Pubitemid 44866453)
13. J.D. Jarrett Isolated, sealed nanofluidic channels formed by combinatorial-mould nanoimprint lithography Nanotechnology 17 2006 1975
14. L.J. Guo, X. Cheng, and C.-F. Chou Fabrication of size-controllable nanofluidic channels by nanoimprinting and its application for DNA stretching Nano Lett. 4 2004 69 73 (Pubitemid 38167866)
15. O. Bakajin, T.A.J. Duke, J. Tegenfeldt, C.-F. Chou, S.S. Chan, R.H. Austin, and E.C. Cox Separation of 100-kilobase DNA molecules in 10 seconds Anal. Chem. 73 2001 6053 6056 (Pubitemid 34042224)
16. M.Y. Balakirev, S. Porte, M. Vernaz-Gris, M. Berger, J.-P. Arié, B. Fouqué, and F. Chatelain Photochemical patterning of biological molecules inside a glass capillary Anal. Chem. 77 2005 5474 5479 (Pubitemid 41266039)
17. B. He, T.J. Morrow, and C.D. Keating Nanowire sensors for multiplexed detection of biomolecules Curr. Opin. Chem. Biol. 12 2008 522 528
18. J. Lepock, H. Frey, and K. Ritchie Protein denaturation in intact hepatocytes and isolated cellular organelles during heat shock J. Cell Biol. 122 1993 1267 1276 (Pubitemid 23277295)
19. H.Y. Wang, R.S. Foote, S.C. Jacobson, J.H. Schneibel, and J.M. Ramsey Low temperature bonding for microfabrication of chemical analysis devices Sens. Actuators B: Chem. 45 1997 199 207 (Pubitemid 127434770)
20. L.X. Chen, G.A. Luo, K.H. Liu, J.P. Ma, B. Yao, Y.C. Yan, and Y.M. Wang Bonding of glass-based microfluidic chips at low- or room-temperature in routine laboratory Sens. Actuators B: Chem. 119 2006 335 344 (Pubitemid 44348917)
21. J. Gu, R. Gupta, C.-F. Chou, Q. Wei, and F. Zenhausern A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature Lab Chip 7 2007 1198 1201 (Pubitemid 47295970)
22. T.M. Herne, and M.J. Tarlov Characterization of DNA probes immobilized on gold surfaces J. Am. Chem. Soc. 119 1997 8916 8920 (Pubitemid 27421377)
23. B. Millare, M. Thomas, A. Ferreira, H. Xu, M. Holesinger, and V.I. Vullev Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the conditions of treatment with oxygen plasma Langmuir 24 2008 13218 13224
24. S. Bhattacharya, A. Datta, J.M. Berg, and S. Gangopadhyay Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength J. Microelectromech. Syst. 14 2005 590 597 (Pubitemid 41005078)
25. T. Okamoto, T. Suzuki, and N. Yamamoto Microarray fabrication with covalent attachment of DNA using Bubble Jet technology Nat. Biotechnol. 18 2000 438 441 (Pubitemid 30217534)
26. T. Leichle, M. Lishchynska, F. Mathieu, J.B. Pourciel, D. Saya, and L. Nicu A microcantilever-based picoliter droplet dispenser with integrated force sensors and electroassisted deposition means J. Microelectromech. Syst. 17 2008 1239 1253
27. D.S. Ginger, H. Zhang, and C.A. Mirkin The evolution of dip-pen nanolithography Angew. Chem. Int. Ed. 43 2004 30 45 (Pubitemid 38063469)