A strategy for increased carbon ionization in magnetron sputtering discharges

Diamond and Related Materials

Volumn 23, Issue , 2012, Pages 1-4

  Aijaz, Asim ^a   Sarakinos, Kostas ^a   Lundin, Daniel ^a   Brenning, Nils ^a,b   Helmersson, Ulf ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Carbon ionization; Diamond like carbon; HiPIMS; HPPMS; Tetrahedral amorphous carbon

Indexed keywords

CONVENTIONAL MAGNETRON SPUTTERING; DENSITY VALUE; DIAMOND-LIKE CARBON; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIPIMS; HPPMS; ION FLUXES; ION POPULATION; IONIZATION ENHANCEMENT; MASS DENSITIES; SPUTTERING GAS; TETRAHEDRAL AMORPHOUS CARBON;

CARBON; MAGNETRON SPUTTERING; NEON;

IONIZATION OF GASES;

EID: 84856204275     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.12.043     Document Type: Article

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