Carbon atom and cluster sputtering under low-energy noble gas plasma bombardment

Journal of Applied Physics

Volumn 104, Issue 4, 2008, Pages

  Oyarzabal, E ^a   Doerner, R P ^a   Shimada, M ^b   Tynan, G R ^a  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

^b IDAHO NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC PHYSICS; ATOMS; CARBON; CARBON CLUSTERS; CHLORINE COMPOUNDS; EROSION; GASES; HELIUM; INERT GASES; IONIZATION OF GASES; IONS; KRYPTON; MASS SPECTROMETRY; NEON; PLASMAS; SOIL MECHANICS; SPUTTERING; XENON;

CARBON ATOMS; NOBLE GASES; SPUTTERED PARTICLES;

ANGULAR DISTRIBUTION;

EID: 50849120395     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2968549     Document Type: Article

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