Tribological behavior of thick CrN coatings deposited by modulated pulsed power magnetron sputtering

Surface and Coatings Technology

Volumn 206, Issue 8-9, 2012, Pages 2474-2483

  Lin, Jianliang ^a   Sproul, William D ^a,b   Moore, John J ^a  

^a Department of Metallurgical and Materials Engineering   (United States)

^b Reactive Sputtering INC   (United States)

Author keywords

CrN; High power impulse magnetron sputtering (HIPIMS); High power pulsed magnetron sputtering (HPPMS); Modulated pulsed power (MPP) magnetron sputtering; Scratch testing; Thick coating

Indexed keywords

CRN; HIGH POWER PULSED MAGNETRON SPUTTERING; HIGH-POWER; PULSED-POWER; SCRATCH TESTING; THICK COATINGS;

ADHESION; ALUMINUM; COATINGS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SILICON ALLOYS; SUBSTRATES; TRIBOLOGY; TUNGSTEN ALLOYS; WEAR OF MATERIALS;

TUNGSTEN CARBIDE;

EID: 84855283075     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.10.053     Document Type: Article

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