A comparative study of CrNx coatings Synthesized by dc and pulsed dc magnetron sputtering

Thin Solid Films

Volumn 517, Issue 6, 2009, Pages 1887-1894

  Lin, J ^a   Wu, Z L ^a,b   Zhang, X H ^a,c   Mishra, B ^a   Moore, J J ^a   Sproul, W D ^d  

^a Department of Metallurgical and Materials Engineering   (United States)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c SOUTHEAST UNIVERSITY   (China)

^d Reactive Sputtering INC   (United States)

Author keywords

Chromium nitride (CrN); Hard coatings; Ion energy distribution (IED); Plasma diagnostic; Pulsed magnetron sputtering (PMS); Wear

Indexed keywords

CHROMATE COATINGS; CHROMIUM; COATINGS; ELECTRIC POWER DISTRIBUTION; HARDNESS; ION BEAMS; ION BOMBARDMENT; IONS; MAGNETRON SPUTTERING; MAGNETRONS; MICROSTRUCTURE; NITRIDES; OCEANOGRAPHIC EQUIPMENT; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA PROBES; PLASMA SOURCES; PLASMAS; THEOREM PROVING; WEAR RESISTANCE;

AXIAL STRUCTURES; CHROMIUM NITRIDE (CRN); CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEMS; COLUMNAR STRUCTURES; COMPARATIVE STUDIES; DISCHARGED PLASMAS; DUTY CYCLES; EV REGIONS; HARDNESS VALUES; ION ENERGIES; ION ENERGY DISTRIBUTION (IED); ION FLUXES; METAL TARGETS; NITROGEN DOPED; NITROGEN FLOW RATES; PULSED DC MAGNETRON SPUTTERING; PULSED MAGNETRON SPUTTERING (PMS); PULSED PLASMAS; SPUTTERED COATINGS; WEAR; WEAR RATES;

HARD COATINGS;

EID: 58149086188     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.09.093     Document Type: Article

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