SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 769, Issue , 2003, Pages 165-170

Low Temperature PECVD Silicon Oxide For Devices And Circuits On Flexible Substrates

(2) Meitine, Mark a Sazonov, Andrei a

a UNIVERSITY OF WATERLOO (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CURRENT DENSITY; DIELECTRIC DEVICES; ELECTROMAGNETIC WAVE ABSORPTION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GATES (TRANSISTOR); LEAKAGE CURRENTS; MOLECULAR VIBRATIONS; MOS CAPACITORS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SILICA; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

CHANNEL MOBILITY; FILM DENSITY;

CIRCUIT THEORY;

EID: 1542440034 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-769-h6.6 Document Type: Conference Paper

Times cited : (17)

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