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Volumn 175-176, Issue , 2001, Pages 12-16

Low-temperature silicon nitride for thin-film electronics on polyimide foil substrates

Author keywords

Low deposition temperature; Plasma enhanced chemical vapor deposition; Plastic substrates; Silicon nitride; Thin film transistors

Indexed keywords

AMMONIA; AMORPHOUS FILMS; AMORPHOUS SILICON; DIELECTRIC FILMS; ELECTRIC BREAKDOWN OF SOLIDS; ETCHING; FILM GROWTH; HYDROGEN; LOW TEMPERATURE PROPERTIES; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; REFRACTIVE INDEX; SILANES; THIN FILM TRANSISTORS;

EID: 0035873121     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00050-2     Document Type: Article
Times cited : (57)

References (19)
  • 12
    • 0343358008 scopus 로고    scopus 로고
    • Buffered oxide etch, 10:1, with surfactant, CMOS grade; J.T. Baker Chemical Co., Phillipsburg, NJ ( catalog number 5332-03
    • Buffered oxide etch, 10:1, with surfactant, CMOS grade; J.T. Baker Chemical Co., Phillipsburg, NJ ( http://www.jtbaker.com ); catalog number 5332-03.
  • 13
    • 0342488664 scopus 로고    scopus 로고
    • Analysis performed by Evans East, Plainsboro, NJ
    • Analysis performed by Evans East, Plainsboro, NJ.
  • 18
    • 0342922800 scopus 로고    scopus 로고
    • Ph.D. thesis, Princeton University
    • Eugene Ma, Ph.D. thesis, Princeton University, 1999.
    • (1999)
    • Eugene Ma1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.