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Volumn 175-176, Issue , 2001, Pages 12-16
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Low-temperature silicon nitride for thin-film electronics on polyimide foil substrates
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Author keywords
Low deposition temperature; Plasma enhanced chemical vapor deposition; Plastic substrates; Silicon nitride; Thin film transistors
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Indexed keywords
AMMONIA;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
DIELECTRIC FILMS;
ELECTRIC BREAKDOWN OF SOLIDS;
ETCHING;
FILM GROWTH;
HYDROGEN;
LOW TEMPERATURE PROPERTIES;
PERMITTIVITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYIMIDES;
REFRACTIVE INDEX;
SILANES;
THIN FILM TRANSISTORS;
DIELECTRIC BREAKDOWN;
SILICON NITRIDE;
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EID: 0035873121
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(01)00050-2 Document Type: Article |
Times cited : (57)
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References (19)
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