Electro-thermal simulation and characterization of preconcentration membranes

Sensors and Actuators, A: Physical

Volumn 172, Issue 1, 2011, Pages 124-128

  Ingles R ^a   Pallares, J ^a   Grcia, I ^b   Gue A M ^c   Ramirez, J L ^a  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c LAAS CNRS   (France)

Author keywords

Electrothermal simulation; Heater design; Planar preconcentrator

Indexed keywords

DESORPTION PEAKS; ELECTRO-THERMAL SIMULATION; FUTURE DESIGNS; INFRA-RED CAMERAS; NUMERICAL PREDICTIONS; PRE-CONCENTRATION; PRE-CONCENTRATOR; PRECONCENTRATORS; SENSOR RESPONSE; THERMAL HOMOGENEITY; THIN FILM HEATERS;

DESORPTION; SENSORS; TEMPERATURE MEASUREMENT;

DESIGN;

EID: 82755194836     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.03.025     Document Type: Conference Paper

References (15)

1. I. Voiculescu, M. Zaghloul, and N. Narasimhan Microfabricated chemical preconcentrators for gas-phase microanalytical detection systems Trac - Trends in Analytical Chemistry 27 2008 327 343
2. R. Manginell, P. Ronald, G. Frye-Mason, R. Kottenstette, P. Lewis, C. Wong, Microfabricated planar preconcentrator, Tech. Digest 2000 Sol.-State Sensor and Actuator Workshop, Cleveland, 2000, pp. 179-182.
3. A. Gotz, I. Gracia, C. Cane, and E. LoraTamayo Thermal and mechanical aspects for designing micromachined low-power gas sensors Journal of Micromechanics and Microengineering 7 1997 247 249 (Pubitemid 127607092)
4. D. Briand, A. Krauss, B. van der Schoot, U. Weimar, N. Barsan, and W. Gopel Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors Sensors and Actuators B-Chemical 68 2000 223 233
5. D. Barrettino, M. Graf, W. Song, K. Kirstein, A. Hierlemann, and H. Baltes Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500 °C IEEE Journal of Solid-state Circuits 39 2004 1202 1207
6. 2 gas sensor integrated on silicon oxynitride membrane Sensors and Actuators B-Chemical 67 2000 84 88
7. M. Baroncini, P. Placidi, A. Scorzoni, G. Cardinali, L. Dori, and S. Nicoletti Accurate extraction of the temperature of the heating element in micromachined gas sensor Proceedings of the IEEE International Symposium on Circuits and Systems Sydney 2001 445 448 (Pubitemid 32469888)
8. G. Cardinali, L. Dori, M. Fiorini, I. Sayago, G. Faglia, and C. Perego A smart sensor system for carbon monoxide detection Analog Integrated Circuits and Signal Processing 14 1997 275 296 (Pubitemid 127506633)
9. J. Belmonte, J. Puigcorbe, J. Arbiol, A. Vila, J. Morante, and N. Sabate High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications Sensors and Actuators B-Chemical 114 2006 826 835
10. C. Rossi, E. Scheid, and D. Esteve Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes Sensors and Actuators A-Physical 63 1997 183 189 (Pubitemid 127381582)
11. D. Briand, S. Heimgartner, M. Gretillat, B. van der Schoot, and N. de Rooij Thermal optimization of micro-hotplates that have a silicon island Journal of Micromechanics and Microengineering 12 2002 971 978 (Pubitemid 35369267)
12. A. Gotz, I. Gracia, C. Cane, E. Lora-Tamayo, M. Horrillo, and J. Getino A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons Sensors and Actuators B-Chemical 44 1997 483 487 (Pubitemid 127437417)
13. F. Udrea, J. Gardner, D. Setiadi, J. Covington, T. Dogaru, and C. Lua Design and simulations of SOICMOS micro-hotplate gas sensors Sensors and Actuators B-Chemical 78 2001 180 190 (Pubitemid 32746213)
14. 2 gas sensor using a FEM simulator Sensors and Actuators A-Physical 69 1998 205 211 (Pubitemid 128401731)
15. R. Hopper, I. Haneef, S.Z. Ali, F. Udrea, and C.H. Oxley Improved Infrared thermal imaging of a CMOS MEMS device Proceedings of the Therminic Conference Barcelona, Spain 2010 122 126