Improved infrared thermal imaging of a CMOS MEMS device

16th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2010

Volumn , Issue , 2010, Pages 122-126

  Hopper, Richard H ^a   Haneef, Ibraheem ^b,c   Ali, Syed Zeeshan ^d   Udrea, Florin ^b,d   Oxley, Christopher H ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c AIR UNIVERSITY   (Pakistan)

^d AMS AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS (COMPLEMENTARY METAL OXIDE SEMICONDUCTOR); CMOS-MEMS; INFRARED THERMAL IMAGING; IR MEASUREMENTS; MEMBRANE LAYERS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-PARTICLES; OPTICAL TRANSPARENCY; SIGNIFICANT SURFACES; SILICON ON INSULATOR; SURFACE TEMPERATURE MEASUREMENT; THERMAL FLOW SENSOR;

ATMOSPHERIC TEMPERATURE; INFRARED IMAGING; METALLIC COMPOUNDS; MOS DEVICES; SEMICONDUCTING SILICON; SENSORS; SILICON COMPOUNDS; SILICON OXIDES; SURFACE PROPERTIES; TEMPERATURE MEASURING INSTRUMENTS;

TEMPERATURE MEASUREMENT;

EID: 78650457749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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