Accurate extraction of the temperature of the heating element in micromachined gas sensors

ISCAS 2001 - 2001 IEEE International Symposium on Circuits and Systems, Conference Proceedings

Volumn 3, Issue , 2001, Pages 445-448

  Baroncini, M ^a   Placidi, P ^a   Scorzoni, A ^a   Cardinali, G C ^b   Dori, L ^b   Nicoletti, S ^b  

^a Dipartimento di Ingegneria Elettronica e dell'Informazione (DIEI)   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MEMBRANES; MICROMACHINED GAS SENSOR; POWER CURVES; PRECISE DETERMINATIONS; THERMAL BEHAVIORS; WAFER LEVEL;

ELECTRIC HEATING ELEMENTS; CHEMICAL SENSORS;

COMPUTER SIMULATION; DIELECTRIC MATERIALS; ELECTRIC HEATING ELEMENTS; MATHEMATICAL MODELS; THERMAL EFFECTS;

MICROMACHINED GAS SENSORS;

EID: 0034998503     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2001.921343     Document Type: Conference Paper

References (8)

1. 2 sputtered thin film gas sensors", in Proc. Transducers'91, 6th Int. Conf. on Sensors and Actuators, San Francisco, CA, USA, 1991, pp. 165-168.
2. Dori L., Maccagnani P., Cardinali G. C. et al. "New materials and heater geometry for high performance micromachined thermally insulated structures in gas sensor applications". Proc. Eurosensors XI, Warsaw (Poland). 1997, pp. 289-292.
3. Sberveglieri G., Baratto C, et al. "Recent Progress on Gas Sensors Based on Semiconducting Thin Films". Sensors and Actuators B 2, 1999, pp. 65-72.
4. 2 thin film gas sensor", Sensors and Actuators B, vol. 6, pp. 239-247, 1992.
5. Cardinali G. C, Dori L., et al. "A smart sensor system for carbon monoxide detection". Analog Integrated Circuits and Signal Processing, 14, pp. 275-296, 1997. (Pubitemid 127506633)
6. 3 film and low power consumption micromachined Si-based structure". Proc. Transducers'97, Int. Conf. On Solid-State Sens. & Act., 1997, pp. 943-946
7. Moller S. Lin J., and Obermeier E. "Material and design considerations for low power microheater modules for gas sensor applications". Proc. V Int. Meeting on Chemical Sensors, Rome (Italy), 1994, vol. 1, pp. 433-436.
8. Dumitrescu M., Cobianu C. et al. "Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation" - Proc. Eurosensors XI, Sept. 21-24, Warsaw (Poland), 1997, pp. 147-150.