Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime

Journal of Microelectromechanical Systems

Volumn 20, Issue 6, 2011, Pages 1228-1230

  Lee, Hyung Kyu ^a   Melamud, Renata ^b   Chandorkar, Saurabh ^c   Salvia, James ^b   Yoneoka, Shingo ^d   Kenny, Thomas W ^a  

^a Stanford University   (United States)

^b SiTime Corporation   (United States)

^c INTEL CORPORATION   (United States)

^d MCube Corporation   (United States)

Author keywords

Nonlinearity; oscillators; resonators; stability

Indexed keywords

MEMS OSCILLATORS; MICROELECTROMECHANICAL SYSTEMS RESONATORS; NON-LINEAR REGIMES; NON-LINEARITY; NONLINEAR OPERATION; OPEN-LOOP RESONATORS; STABLE OPERATION; VIBRATION AMPLITUDE;

CONVERGENCE OF NUMERICAL METHODS; MEMS; MICROELECTROMECHANICAL DEVICES; OSCILLATORS (ELECTRONIC);

RESONATORS;

EID: 82455164076     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2170821     Document Type: Article

References (21)

1. J. R. Vig and A. Ballato, "Frequency control devices," in Ultrasonic Instruments and Devices, E. P. Papadakis, Ed. San Diego, CA: Academic, 1999, ch. 7, pp. 637-701.
2. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 54, no. 2, pp. 251-270, Feb. 2007.
3. D. Leeson, "A simple model of feedback oscillator noise spectrum," Proc. IEEE, vol. 54, no. 2, pp. 329-330, Feb. 1966.
4. T. Mattila, J. Kiihamäki, T. Lamminmäki, and O. Jaakkola, "A 12 MHz micromechanical bulk acoustic mode oscillator," Sens. Actuators A, Phys., vol. 101, no. 1/2, pp. 1-9, Jan. 2002.
5. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Squareextensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," IEEE Electron Device Lett., vol. 25, no. 4, pp. 173-175, Apr. 2004.
6. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Series-resonant VHF micromechanical resonator reference oscillators," IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
7. S. Lee and C. T.-C. Nguyen, "Mechanically-coupled micromechanical resonator arrays for improved phase noise," in Proc. IEEE Int. Freq. Control Symp., Montreal, QC, Canada, Aug. 29-31, 2004, pp. 144-150.
8. M. Agarwal, R. N. Candler, B. Kim,M. Hopcroft, R. Melamud, C. M. Jha, T. W. Kenny, and B. Murmann, "Optimal drive condition for nonlinearity reduction in electrostatic microresonators," Appl. Phys. Lett., vol. 89, no. 21, p. 214105, Jan. 2006.
9. M. Akgul, B. Kim, L.-W. Hung, Y. Lin, W.-C. Li, W.-L. Huang, I. Gurin, A. Borna, and C. T.-C. Nguyen, "Oscillator far-from-carrier phase noise reduction via nano-scale gap tuning of micromechanical resonators," in Proc. IEEE 15th Int. Conf. Solid-State Sens., Actuators Microsyst. (TRANSDUCERS), Denver, CO, Jun. 21-25, 2009, pp. 798-801.
10. V. Kaajakari, T. Mattila, A. Oja, and H. Seppä, "Nonlinear limits for single-crystal silicon microresonators," J. Microelectromech. Syst., vol. 13, no. 5, pp. 715-724, Oct. 2004.
11. L.C. Shao,M.Palaniapan,W.W.Tan, andL. Khine, "Nonlinearity in micromechanical free-free beam resonators: Modeling and experimental verification," J. Micromech. Microeng., vol. 18, no. 2, p. 025017, Jan. 2008.
12. H. K. Lee, J. C. Salvia, S. Yoneoka, Y. Q. Qu, R. Melamud, S. Chandorkar, M. A. Hopcroft, B. Kim, and T. W. Kenny, "Stable oscillation of MEMS resonators beyond the critical bifurcation point," in Proc. 14th Solid-State Sens., Actuators Microsyst. Workshop (Hilton Head), Hilton Head Island, SC, Jun. 6-10, 2010, pp. 70-73.
13. M. I. Younis and A. H. Nayfeh, "A study of the nonlinear response of a resonant microbeam to an electric actuation," Nonlinear Dyn., vol. 31, no. 1, pp. 91-117, Jan. 2003.
14. V. Kaajakari, T. Mattila, A. Lipsanen, and A. Oja, "Nonlinear mechanical effects in silicon longitudinal mode beam resonators," Sens. Actuators A, Phys., vol. 120, no. 1, pp. 64-70, Jan. 2005.
15. S. Lee and C. T.-C. Nguyen, "Influence of automatic level control on micromechanical resonator oscillator phase noise," in Proc. IEEE Int. Freq. Control Symp., Tampa, FL, May 4-8, 2003, pp. 341-349.
16. B. Yurke, D. S. Greywall, A. Pargellis, and P. Busch, "Theory of amplifiernoise evasion in an oscillator employing a nonlinear resonator," Phys. Rev. A, Gen. Phys., vol. 51, no. 5, pp. 4211-4229, May 1995.
17. R. M. C. Mestrom, R. H. B. Fey, and H. Nijmeijer, "Phase feedback for nonlinear MEM resonators in oscillator circuits," IEEE/ASME Trans. Mechatronics, vol. 14, no. 4, pp. 423-433, Aug. 2009.
18. R. N. Candler, M. Hopcroft, B. Kim, W.-T. Park, R. Melamud, M. Agarwal, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Longterm and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators," J. Microelectromech. Syst., vol. 15, no. 6, pp. 1446-1456, Dec. 2006.
19. M. Agarwal, H. Mehta, R. N. Candler, S. Chandorkar, B. Kim, M. A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T. W. Kenny, and B. Murmann, "Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators," J. Appl. Phys., vol. 102, no. 7, p. 074903, Jan. 2007.
20. D. Elata and H. Bamberger, "On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources," J. Microelectromech. Syst., vol. 15, no. 1, pp. 131-140, Feb. 2006.
21. A. H. Nayfeh, M. I. Younis, and E. Abdel-Rahman, "Dynamic pull-in phenomenon in MEMS resonators," Nonlinear Dyn., vol. 48, no. 1/2, pp. 153-163, Apr. 2007.