Large-scale integration of single-walled carbon nanotubes and graphene into sensors and devices using dielectrophoresis: A review

Journal of Materials Research

Volumn 26, Issue 13, 2011, Pages 1561-1571

  Burg, Brian R ^a   Poulikakos, Dimos ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOMATERIALS; DEPOSITION PROCESS; DEVICE INTEGRATION; DIELECTROPHORETIC; DIRECTED ASSEMBLY; ELECTROKINETIC; EMERGING MATERIALS; EXPERIMENTAL METHODS; FABRICATION COST; FUNCTIONAL DEVICES; FUNDAMENTAL LIMITATIONS; HIGH THROUGHPUT; HIGH-QUALITY SOLUTIONS; INTEGRATION PROCESS; LOW COSTS; OPERATION POWER; PROCESS TECHNOLOGIES; SENSITIVITY ENHANCEMENTS; SENSOR MINIATURIZATION; TRADITIONAL MATERIALS; ULTRA-SMALL;

DIELECTRIC DEVICES; ELECTROPHORESIS; ENERGY UTILIZATION; EQUIPMENT; GRAPHENE; MINIATURE INSTRUMENTS; SENSORS;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 81455159217     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/jmr.2011.186     Document Type: Review

References (88)

1. H.G. Craighead: Nanoelectromechanical systems. Science 290, 1532 (2000).
2. M.L. Roukes: Nanoelectromechanical systems for the future. Phys. World 14, 25 (2001).
3. H.A. Pohl: The motion and precipitation of suspensoids in divergent electric fields. J. Appl. Phys. 22, 869 (1951).
4. H.A. Pohl: Dielectrophoresis (Cambridge Univ. Press, Cambridge, England, 1978).
5. T.B. Jones: Electromechanics of Particles (Cambridge Univ. Press, Cambridge, England, 1995).
6. H. Morgan and N.G. Green: AC Electrokinetics: Colloids and Nanoparticles (Research Studies Press Ltd., Hertfordshire, England, 2003).
7. S. Iijima and T. Ichihashi: Single-shell carbon nanotubes of 1-nm diameter. Nature 363, 603 (1993).
8. D.S. Bethune, C.H. Kiang, M.S. de Vries, G. Gorman, R. Savoy, J. Vazquez, and R. Beyers: Cobalt-catalysed growth of carbon nanotubes with single-atomic-layer walls. Nature 363, 605 (1993).
9. R. Saito, G. Dresselhaus, and M.S. Dresselhaus: Physical Properties of Carbon Nanotubes (Imperial College Press, London, England, 1998).
10. A. Jorio, G. Dresselhaus, and M.S. Dresselhaus: Carbon Nanotubes: Advanced Topics in the Synthesis, Structure, Properties and Applications (Springer, Berlin, Germany, 2008).
11. S. Reich, C. Thomsen, and J. Maultzsch: Carbon Nanotubes: Basic Concepts and Physical Properties (Wiley-VCH, Weinheim, Germany, 2004).
12. M.J. O'Connell, Ed.: Carbon Nanotubes: Properties and Applications (Taylor & Francis, Boca Raton, FL, 2006).
13. C. Dekker: Carbon nanotubes as molecular quantum wires. Phys. Today 52, 22 (1999).
14. P.L. McEuen: Single-wall carbon nanotubes. Phys. World 13, 31 (2000).
15. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, and A.A. Firsov: Electric field effect in atomically thin carbon films. Science 306, 666 (2004).
16. A.K. Geim and K.S. Novoselov: The rise of graphene. Nat. Mater. 6, 183 (2007).
17. A.H. Castro Neto, F. Guinea, N.M.R. Peres, K.S. Novoselov, and A.K. Geim: The electronic properties of graphene. Rev. Mod. Phys. 81, 109 (2009).
18. A.K. Geim: Graphene: Status and prospects. Science 324, 1530 (2009).
19. S. Stankovich, D.A. Dikin, G.H.B. Dommett, K.M. Kohlhaas, E.J. Zimney, E.A. Stach, R.D. Piner, S.T. Nguyen, and R.S. Ruoff: Graphene-based composite materials. Nature 442, 282 (2006).
20. S. Park and R.S. Ruoff: Chemical methods for the production of graphenes. Nat. Nanotechnol. 4, 217 (2009).
21. B.R. Burg, V. Bianco, J. Schneider, and D. Poulikakos: Electrokinetic framework of dielectrophoretic deposition devices. J. Appl. Phys. 107, 124308 (2010).
22. H.A. Pohl and I. Hawk: Separation of living and dead cells by dielectrophoresis. Science 152, 647 (1966).
23. M. Washizu and O. Kurosawa: Electrostatic manipulation of DNA in microfabricated structures. IEEE Trans. Ind. Appl. 26, 1165 (1990).
24. P.A. Smith, C.D. Nordquist, T.N. Jackson, T.S. Mayer, B.R. Martin, J. Mbindyo, and T.E. Mallouk: Electric-field assisted assembly and alignment of metallic nanowires. Appl. Phys. Lett. 77, 1399 (2000).
25. K. Yamamoto, S. Akita, and Y. Nakayama: Orientation of carbon nanotubes using electrophoresis. Jpn. J. Appl. Phys. 35, 917 (1996).
26. X.Q. Chen, T. Saito, H. Yamada, and K. Matsushige: Aligning single-wall carbon nanotubes with an alternating-current electric field. Appl. Phys. Lett. 78, 3714 (2001). (Pubitemid 32519495)
27. A. Ramos, H. Morgan, N.G. Green, and A. Castellanos: AC electrokinetics: A review of forces in microelectrode structures. J. Phys. D: Appl. Phys. 31, 2338 (1998).
28. M. Dimaki and P. Bøggild: Dielectrophoresis of carbon nanotubes using microelectrodes: A numerical study. Nanotechnology 15, 1095 (2004).
29. Y. Lin, J. Shiomi, S. Maruyama, and G. Amberg: Electrothermal flow in dielectrophoresis of single-walled carbon nanotubes. Phys. Rev. B 76, 045419 (2007).
30. Y. Lin, J. Shiomi, and G. Amberg: Numerical calculation of the dielectrophoretic force on a slender body. Electrophoresis 30, 831 (2009).
31. M.J. O'Connell, S.M. Bachilo, C.B. Huffman, V.C. Moore, M.S. Strano, E.H. Haroz, K.L. Rialon, P.J. Boul, W.H. Noon, C. Kittrell, J.P. Ma, R.H. Hauge, R.B. Weisman, and R.E. Smalley: Band gap fluorescence from individual single-walled carbon nanotubes. Science 297, 593 (2002).
32. S.M. Bachilo, M.S. Strano, C. Kittrell, R.H. Hauge, R.E. Smalley, and R.B. Weisman: Structure-assigned optical spectra of singlewalled carbon nanotubes. Science 298, 2361 (2002).
33. M.F. Islam, E. Rojas, D.M. Bergey, A.T. Johnson, and A.G. Yodh: High weight fraction surfactant solubilization of single-wall carbon nanotubes in water. Nano Lett. 3, 269 (2003).
34. V.C. Moore, M.S. Strano, E.H. Haroz, R.H. Hauge, and R.E. Smalley: Individually suspended single-walled carbon nanotubes in various surfactants. Nano Lett. 3, 1379 (2003).
35. M.S. Arnold, A.A. Green, J.F. Hulvat, S.I. Stupp, and M.C. Hersam: Sorting carbon nanotubes by electronic structure using density differentiation. Nat. Nanotechnol. 1, 60 (2006).
36. J.N. Coleman: Liquid-phase exfoliation of nanotubes and graphene. Adv. Funct. Mater. 19, 3680 (2009).
37. M.C. Hersam: Progress towards monodisperse single-walled carbon nanotubes. Nat. Nanotechnol. 3, 387 (2008).
38. C.W. Zhou, J. Kong, and H. Dai: Electrical measurements of individual semiconducting single-walled carbon nanotubes of various diameters. Appl. Phys. Lett. 76, 1597 (2000).
39. W. Kim, A. Javey, R. Tu, J. Cao, Q. Wang, and H. Dai: Electrical contacts to carbon nanotubes down to 1 nm in diameter. Appl. Phys. Lett. 87, 173101 (2005).
40. Z.H. Chen, J. Appenzeller, J. Knoch, Y.M. Lin, and P. Avouris: The role of metal-nanotube contact in the performance of carbon nanotube field-effect transistors. Nano Lett. 5, 1497 (2005).
41. J. Kong, H.T. Soh, A.M. Cassell, C.F. Quate, and H. Dai: Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers. Nature 395, 878 (1998).
42. Y. Kobayashi, H. Nakashima, D. Takagi, and Y. Homma: CVD growth of single-walled carbon nanotubes using size-controlled nanoparticle catalyst. Thin Films 464-465, 286 (2004).
43. A.G. Nasibulin, P.V. Pikhitsa, H. Jiang, and E.I. Kauppinen: Correlation between catalyst particle and single-walled carbon nanotube diameters. Carbon 43, 2251 (2005).
44. L. Durrer, J. Greenwald, T. Helbling, M. Muoth, R. Riek, and C. Hierold: Narrowing SWNT diameter distribution using sizeseparated ferritin-based Fe catalysts. Nanotechnology 20, 355601 (2009).
45. F. Hennrich, R. Krupke, K. Arnold, J.A. Rojas Stütz, S. Lebedkin, T. Koch, T. Schimmel, and M.M. Kappes: The mechanism of cavitation-induced scission of single-walled carbon nanotubes. J. Phys. Chem. B 111, 1932 (2007).
46. B.R. Burg, J. Schneider, M. Muoth, L. Durrer, T. Helbling, N.C. Schirmer, T. Schwamb, C. Hierold, and D. Poulikakos: Aqueous dispersion and dielectrophoretic assembly of individual surfacesynthesized single-walled carbon nanotubes. Langmuir 25, 7778 (2009).
47. W.S. Hummers Jr. and R.E. Offeman: Preparation of graphitic oxide. J. Am. Chem. Soc. 80, 1339 (1958).
48. S. Stankovich, D.A. Dikin, R.D. Piner, K.A. Kohlhaas, A. Kleinhammes, Y. Jia, Y. Wu, S.T. Nguyen, and R.S. Ruoff: Synthesis of graphene-based nanosheets via chemical reduction of exfoliated graphite oxide. Carbon 45, 1558 (2007).
49. D. Li, M.B. Müller, S. Gilje, R.B. Kaner, and G.G. Wallace: Processable aqueous dispersions of graphene nanosheets. Nat. Nanotechnol. 3, 101 (2008).
50. Y. Hernandez, V. Nicolosi, M. Lotya, F.M. Blighe, Z. Sun, S. De, I.T. McGovern, B. Holland, M. Byrne, Y.K. Gun'ko, J.J. Boland, P. Niraj, G. Duesberg, S. Krishnamurthy, R. Goodhue, J. Hutchison, V. Scardaci, A.C. Ferrari, and J.N. Coleman: High-yield production of graphene by liquid-phase exfoliation of graphite. Nat. Nanotechnol. 3, 563 (2008).
51. M. Lotya, Y. Hernandez, P.J. King, R.J. Smith, V. Nicolosi, L.S. Karlsson, F.M. Blighe, S. De, Z. Wang, I.T. McGovern, G.S. Duesberg, and J.N. Coleman: Liquid phase production of graphene by exfoliation of graphite in surfactant/water solutions. J. Am. Chem. Soc. 131, 3611 (2009).
52. A.A. Green and M.C. Hersam: Emerging methods for producing monodisperse graphene dispersions. J. Phys. Chem. Lett. 1, 544 (2010).
53. R. Krupke, F. Hennrich, H.B. Weber, M.M. Kappes, and H.v. Loehneysen: Simultaneous deposition of metallic bundles of singlewalled carbon nanotubes using ac-dielectrophoresis. Nano Lett. 3, 1019 (2003).
54. 3 for sensor applications. Nanotechnology 20, 434010 (2009).
55. T. Schwamb, T.-Y. Choi, N. Schirmer, N.R. Bieri, B. Burg, J. Tharian, U. Sennhauser, and D. Poulikakos: A dielectrophoretic method for high yield deposition of suspended, individual carbon nanotubes with four-point electrode contact. Nano Lett. 7, 3633 (2007).
56. T. Schwamb, B.R. Burg, N.C. Schirmer, and D. Poulikakos: An electrical method for the measurement of the thermal and electrical conductivity of reduced graphene oxide nanostructures. Nanotechnology 20, 405704 (2009).
57. A. Vijayaraghavan, S. Blatt, D. Weissenberger, M. Oron-Carl, F. Hennrich, D. Gerthsen, H. Hahn, and R. Krupke: Ultra-large-scale directed assembly of single-walled carbon nanotube devices. Nano Lett. 7, 1556 (2007).
58. B.R. Burg, F. Lütolf, J. Schneider, N.C. Schirmer, T. Schwamb, and D. Poulikakos: High-yield dielectrophoretic assembly of twodimensional graphene nanostructures. Appl. Phys. Lett. 94, 053110 (2009).
59. P. Stokes and S.I. Khondaker: High quality solution processed carbon nanotube transistors assembled by dielectrophoresis. Appl. Phys. Lett. 96, 083110 (2010).
60. P. Stokes and S.I. Khondaker: Evaluating defects in solutionprocessed carbon nanotube devices via low-temperature transport spectroscopy. ACS Nano 4, 2659 (2010).
61. R. Saito, M. Fujita, G. Dresselhaus, and M.S. Dresselhaus: Electronic structure of chiral graphene tubules. Appl. Phys. Lett. 60, 2204 (1992).
62. R. Krupke, F. Hennrich, H.v. Loehneysen, and M.M. Kappes: Separation of metallic from semiconducting single-walled carbon nanotubes. Science 301, 344 (2003).
63. R. Krupke, F. Hennrich, M.M. Kappes, and H.v. Löhneysen: Surface conductance induced dielectrophoresis of semiconducting single-walled carbon nanotubes. Nano Lett. 4, 1395 (2004).
64. R. Krupke, S. Linden, M. Rapp, and F. Hennrich: Thin films of metallic carbon nanotubes prepared by dielectrophoresis. Adv. Mater. 18, 1468 (2006).
65. Y. Kim, S. Hong, S. Jung, M.S. Strano, J. Choi, and S. Baik: Dielectrophoresis of surface conductance modulated single-walled carbon nanotubes using catanionic surfactants. J. Phys. Chem. B 110, 1541 (2006).
66. S. Hong, S. Jung, J. Choi, Y. Kim, and S. Baik: Electrical transport characteristics of surface-conductance-controlled, dielectrophoretically separated single-walled carbon nanotubes. Langmuir 23, 4749 (2007).
67. J. Kang, S. Hong, Y. Kim, and S. Baik: Controlling the carbon nanotube-to-medium conductivity ratio for dielectrophoretic separation. Langmuir 25, 12471 (2009).
68. B.R. Burg, J. Schneider, V. Bianco, N.C. Schirmer, and D. Poulikakos: Selective parallel integration of individual metallic single-walled carbon nanotubes from heterogeneous solutions. Langmuir 26, 10419 (2010).
69. A. Vijayaraghavan, F. Hennrich, N. Stuerzl, M. Engel,M. Ganzhorn, M. Oron-Carl, C.W. Marquardt, S. Dehm, S. Lebedkin, M.M. Kappes, and R. Krupke: Toward single-chirality carbon nanotube device arrays. ACS Nano 4, 2748 (2010).
70. S. Hong, S. Jung, S. Kang, Y. Kim, X. Chen, S. Stankovich, R.S. Ruoff, and S. Baik: Dielectrophoretic deposition of graphite oxide soot particles. J. Nanosci. Nanotechnol. 8, 424 (2008).
71. X. Wu, M. Sprinkle, L. Xuebin, F. Ming, C. Berger, and W.A. de Heer: Epitaxial-graphene/graphene-oxide junction: An essential step towards epitaxial graphene electronics. Phys. Rev. Lett. 101, 026801 (2008).
72. H. Kang, A. Kulkarni, S. Stankovich, R.S. Ruoff, and S. Baik: Restoring electrical conductivity of dielectrophoretically assembled graphite oxide sheets by thermal and chemical reduction techniques. Carbon 47, 1520 (2009).
73. B.R. Burg, J. Schneider, S. Maurer, N.C. Schirmer, and D. Poulikakos: Dielectrophoretic integration of single- and fewlayer graphenes. J. Appl. Phys. 107, 034302 (2010).
74. A. Vijayaraghavan, C. Sciascia, S. Dehm, A. Lombardo, A. Bonetti, A.C. Ferrari, and R. Krupke: Dielectrophoretic assembly of highdensity arrays of individual graphene devices for rapid screening. ACS Nano 3, 1729 (2009).
75. C.-L. Chen, V. Agarwal, S. Sonkusale, and M.R. Dokmeci: The heterogeneous integration of single-walled carbon nanotubes onto complementary metal oxide semiconductor circuitry for sensing applications. Nanotechnology 20, 225302 (2009).
76. D. Joung, A. Chunder, L. Zhai, and S.I. Khondaker: High yield fabrication of chemically reduced graphene oxide field effect transistors by dielectrophoresis. Nanotechnology 21, 165202 (2010).
77. M. Ganzhorn, A. Vijayaraghavan, S. Dehm, F. Hennrich, A.A. Green, M. Fichtner, A. Voigt, M. Rapp, H.v. Loehneysen, M.C. Hersam, M.M. Kappes, and R. Krupke: Hydrogen sensing with diameter- and chirality-sorted carbon nanotubes. ACS Nano 5, 1670 (2011).
78. C.-L. Chen, C.-F. Yang, V. Agarwal, T. Kim, S. Sonkusale, A. Busnaina, M. Chen, and M.R. Dokmeci: DNA-decorated carbon-nanotube-based chemical sensors on complementary metal oxide semiconductor circuitry. Nanotechnology 21, 095504 (2010).
79. T.W. Tombler, C.W. Zhou, L. Alexseyev, J. Kong, H.J. Dai, L. Lei, C.S. Jayanthi, M.J. Tang, and S.Y. Wu: Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation. Nature 405, 769 (2000).
80. E.D. Minot, Y. Yaish, V. Sazonova, J.-Y. Park, M. Brink, and P.L. McEuen: Tuning carbon nanotube band gaps with strain. Phys. Rev. Lett. 90, 156401 (2003).
81. R.J. Grow, Q. Wang, J. Cao, D.W. Wang, and H.J. Dai: Piezoresistance of carbon nanotubes on deformable thin-film membranes. Appl. Phys. Lett. 86, 093104 (2005).
82. C. Stampfer, T. Helbling, D. Obergfell, B. Schoberle, M.K. Tripp, A. Jungen, S. Roth, V.M. Bright, and C. Hierold: Fabrication of single-walled carbon-nanotube-based pressure sensors. Nano Lett. 6, 233 (2006).
83. T. Helbling, C. Roman, and C. Hierold: Signal-to-noise ratio in carbon nanotube electromechanical piezoresistive sensors. Nano Lett. 10, 3350 (2010).
84. B.R. Burg, T. Helbling, C. Hierold, and D. Poulikakos: Piezoresistive pressure sensors with parallel integration of individual single-walled carbon nanotubes. J. Appl. Phys. 109, 064310 (2011).
85. C.W. Marquardt, S. Grunder, A. Błaszczyk, S. Dehm, F. Hennrich, H.v. Löhneysen, M. Mayor, and R. Krupke: Electroluminescence from a single nanotube-molecule-nanotube junction. Nat. Nanotechnol. 5, 863 (2010).
86. R.H. Baughman, A.A. Zakhidov, and W.A. de Heer: Carbon nanotubes: The route toward applications. Science 297, 787 (2002).
87. W. Yang, K.R. Ratinac, S.P. Ringer, P. Thordarson, J.J. Gooding, and F. Braet: Carbon nanomaterials in biosensors: Should you use nanotubes or graphene? Angew. Chem. Int. Ed. 49, 2114 (2010).
88. J.N. Coleman, M. Lotya, A. O'Neill, S.D. Bergin, P.J. King, U. Khan, K. Young, A. Gaucher, S. De, R.J. Smith, I.V. Shvets, S.K. Arora, G. Stanton, H.-Y. Kim, K. Lee, G.T. Kim, G.S. Duesberg, T. Hallam, J.J. Boland, J.J. Wang, J.F. Donegan, J.C. Grunlan, G. Moriarty, A. Shmeliov, R.J. Nicholls, J.M. Perkins, E.M. Grieveson, K. Theuwissen, D.W. McComb, P.D. Nellist, and V. Nicolosi: Two-dimensional nanosheets produced by liquid exfoliation of layered materials. Science 331, 568 (2011).