Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection

Journal of Micromechanics and Microengineering

Volumn 21, Issue 11, 2011, Pages

  Chen, Da ^a   Wang, Jing Jing ^a   Liu, Qi Xin ^a   Xu, Yan ^a   Li, De Hua ^a   Liu, Yi Jian ^a  

^a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION RANGES; HIGHLY SENSITIVE; HYDROGEN CONCENTRATION; HYDROGEN DETECTION; HYDROGEN SENSOR; LIMIT OF DETECTION; PD FILM; PIEZOELECTRIC FILM; PIEZOELECTRIC STACK; RESONANCE FREQUENCIES; ROOM TEMPERATURE; SENSING COATING; THIN FILM BULK ACOUSTIC RESONATOR; ZNO; ZNO THIN FILM;

ACOUSTIC EQUIPMENT; CHEMICAL SENSORS; HYDROGEN; PIEZOELECTRICITY; RESONANCE; RESONATORS; THIN FILMS; ZINC OXIDE;

ACOUSTIC RESONATORS;

EID: 80555131703     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/11/115018     Document Type: Article

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