Hydrogen gas-sensing with bilayer structures of WO3 and Pd in SAW and electric systems

Thin Solid Films

Volumn 517, Issue 22, 2009, Pages 6188-6191

  Jakubik, Wiesław P ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Bi layer structure; Electrical planar method; Hydrogen sensor; Palladium; Surface acoustic wave; Tungsten trioxide

Indexed keywords

BI-LAYER STRUCTURE; ELECTRICAL PLANAR METHOD; HYDROGEN SENSOR; SURFACE ACOUSTIC WAVE; TUNGSTEN TRIOXIDE;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; ELECTRIC CURRENTS; HYDROGEN; PALLADIUM; SENSORS; SOLIDS; TUNGSTEN; VACUUM DEPOSITION;

ACOUSTICS;

EID: 67650561886     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.04.008     Document Type: Article

References (13)

1. Christofides C., and Mandelis A. J. Appl. Phys. 68 (1990) R1
2. Vellekoop M. Ultrasonics 36 (1998) 7
3. Penza M., Cassano G., Aversa P., Cusano A., Consales M., Giordano M., and Nicolais L. IEEE Sens. J. 6 (2006) 867
4. LeGore L.J., Snow K., Galipeau J.D., and Vetelino J.F. Sens. Actuators B 35\36 (1996) 164
5. Ippolito S., Kandasamy S., Kalantar-zadeh K., Trinchi A., and Wlodarski W. Sens. Lett. 1 (2003) 33
6. D'Amico A., Palma A., and Verona E. IEEE Ultrasonics Symp. 1 (1982) 308
7. Jakubik W., Urbańczyk M., Kochowski S., and Bodzenta J. Sens. Actuators B 96 (2003) 321
8. Jakubik W., and Urbańczyk M. Sens. Actuators B 106 (2005) 602
9. Jakubik W., Urbańczyk M., and Opilski A. Ultrasonics 39 (2001) 227
10. Jakubik W. Thin Solid Films 515 (2007) 8345
11. D'Amico A., and Verona E. Sens. Actuators 17 (1989) 55
12. Wohltjen H., Barger W.R., Snow A., and Jarvis L. IEEE Trans. Electron Devices ED-32 (1985) 1170
13. Anisimkin V.I., Kotelyanskii I.M., Verardi P., and Verona E. Sens. Actuators B 23 (1995) 203