Solidly mounted resonators operated in thickness shear mode based on c-axis oriented AlN films

Sensors and Actuators, A: Physical

Volumn 165, Issue 2, 2011, Pages 379-384

  Chen, Da ^a   Wang, Jingjing ^a   Li, Dehua ^a   Xu, Yan ^a   Li, Zhaoxin ^a  

^a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

AlN film; Lateral field excitation; Solidly mounted resonators; Thickness shear mode

Indexed keywords

ALN; ALN FILMS; BIO-CHEMICAL APPLICATIONS; FILM SURFACES; FINITE ELEMENT MODELING; HIGH Q FACTOR; HIGH-FREQUENCY SELECTIVITY; LATERAL ELECTRIC FIELD; LATERAL FIELD EXCITATION; MASS LOADINGS; PARALLEL ELECTRODES; Q-FACTORS; RESONANCE FREQUENCIES; SOLIDLY MOUNTED RESONATOR; THICKNESS SHEAR MODE; THICKNESS SHEAR MODES; VERTICAL ELECTRIC FIELDS;

ELECTRIC FIELDS; ELECTRODES; FREQUENCY RESPONSE; GLYCEROL; Q FACTOR MEASUREMENT; REFLECTION; RESONANCE; RESONATORS; SENSORS; SILICON COMPOUNDS;

SHEAR FLOW;

EID: 79951513367     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.11.008     Document Type: Article

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