Study on Pd functionalization of microcantilever for hydrogen detection promotion

Sensors and Actuators, B: Chemical

Volumn 129, Issue 1, 2008, Pages 72-78

  Chou, Yen I ^a   Chiang, Hsu Cheng ^a   Wang, Chi Chuan ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Hydrogen sensor; Microcantilever; Pd functionalization; Surface design

Indexed keywords

CHEMICAL SENSORS; HYDROGEN; PALLADIUM; SPUTTERING;

HYDROGEN SENSOR; MICROCANTILEVER; SURFACE DESIGN;

CANTILEVER BEAMS;

EID: 38149070928     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.07.072     Document Type: Article

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