Optimal alignment of mirror-based pentaprisms for scanning deflectometric devices

Optical Engineering

Volumn 50, Issue 7, 2011, Pages

  Barber, Samuel K ^a,e   Geckeler, Ralf D ^b   Yashchuk, Valeriy V ^a   Gubarev, Mikhail V ^c   Buchheim, Jana ^d   Siewert, Frank ^d   Zeschke, Thomas ^d  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^c NASA MARSHALL SPACE FLIGHT CENTER   (United States)

^d HAHN MEITNER INSTITUT   (Germany)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

alignment; deflectometry; Developmental long trace profiler; extended shear angle difference; Long trace profiler; mirror based pentaprism; nanometer optical component measuring machine; Optical metrology; pentaprism; Surface profilometer; Surface slope metrology

Indexed keywords

DEFLECTOMETRY; LONG TRACE PROFILER; MIRROR-BASED PENTAPRISM; OPTICAL COMPONENTS; OPTICAL METROLOGY; PENTAPRISM; SHEAR ANGLES; SURFACE PROFILOMETER; SURFACE SLOPE METROLOGY;

ALIGNMENT; ERRORS; LASER OPTICS; LIGHT SOURCES; MIRRORS; OPTICAL DESIGN; OPTICAL SYSTEMS; OPTIMIZATION; SURFACES; SYSTEMATIC ERRORS; UNITS OF MEASUREMENT;

PRISMS;

EID: 80455176696     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3598325     Document Type: Article

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