Developmental long trace profiler using optimally aligned mirror based pentaprism

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7801, Issue , 2010, Pages

  Barber, Samuel K ^a   Morrison, Gregory Y ^a   Yashchuk, Valeriy V ^a   Gubarev, Mikhail V ^b   Geckeler, Ralf D ^c   Buchheim, Jana ^d   Siewert, Frank ^d   Zeschke, Thomas ^d  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b NASA MARSHALL SPACE FLIGHT CENTER   (United States)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^d HAHN MEITNER INSTITUT   (Germany)

Author keywords

alignment; develomental LTP; long trace profiler; LTP; mirror based pentaprism; optical metrology; pentaprism; surface slope metrology

Indexed keywords

DEVELOMENTAL LTP; LONG TRACE PROFILER; LTP; OPTICAL METROLOGY; PENTAPRISM; SURFACE SLOPE METROLOGY;

ALIGNMENT; INSTRUMENTS; LIGHT SOURCES; MEASUREMENTS; MIRRORS; OPTICAL SYSTEMS; OPTICAL TESTING; SURFACES; SYSTEMATIC ERRORS;

PRISMS;

EID: 78049399077     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.859925     Document Type: Conference Paper

References (20)

1. Yashchuk, V. V., Barber, S. K., Domning, E. E., Kirschman, J. L., Morrison, G. Y., Smith, B. V., Siewert, F., Zeschke, T., Geckeler, R. D., and Just, A., "Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler," Nucl. Instr. and Meth. A 616, 212-223 (2010).
2. Assoufid, L., Hignette, O., Howells, M., Irick, S., Lammert, H., and Takacs, P., "Future metrology needs for synchrotron radiation grazing-incidence optics," Nucl. Instr. and Meth. A 467-468, 267-70 (2001).
3. Takacs, P. Z., "X-ray optics metrology," [Handbook of Optics], McGraw-Hill, New York, chapter 46 (2009).
4. Debler, E., Zander, K., Ebenheitsmessung an optischen Planflächen mit Autokollimationsfernrohr und Pentagonprisma, PTB Mitteilungen Forschen + Prüfen, Amts und Mitteilungsblatt der Physikalisch Technischen Bundesanstalt, Braunschweig und Berlin, 339-349 (1979).
5. Siewert, F., Noll, T., Schlegel, T., Zeschke, T., and Lammert, H., "The Nanometer Optical Component Measuring machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY," AIP Conference Proceedings 705, 847-850 (2004).
6. Lammert, H., Noll, T., Schlegel, T., Siewert, F., and Zeschke, T., Optisches Messverfahren und Präzisionsmessmaschine zur Ermittlung von Idealformabweichungen technisch polierter Oberflächen, Patent No.: DE 103 03 659 (28 July 2005).
7. Siewert, F., Lammert, H., Zeschke, T., "The Nanometer Optical Component Measuring Machine," [Modern Developments in X-ray and Neutron Optics], Springer-Verlag, Berlin/Heidelberg, (2008).
8. Geckeler, R. D., and Weingärtner, I., "Sub-nm topography measurement by deflectometry: flatness standard and wafer nanotopography," Proc. SPIE, 4779, 1-12 (2002).
9. Illemann, J., and Wurm, M., "Deflectometric Measurements of Synchrotron-Optics for Postprocessing," AIP Conference Proceedings 705, 843-846 (2004).
10. Geckeler, R. D., "ESAD Shearing Deflectometry: Potentials for Synchrotron Beamline Metrology," Proc. SPIE, 6317, 1-12 (2006).
11. Geckeler, R. D., "Optimal use of pentaprisms in highly accurate deflectometric scanning," Meas. Sci. Technol., 18 115-125 (2007).
12. www.thorlabs.com
13. Wood, C. S., Bennett, S. C., Roberts, J. L., Cho, D., and Wieman, C. E., "Precision Measurement of Parity Nonconsevation in Cesium," Can. J. Phys. 77, 7-77 (1999).
14. Analytical solution of the alignment procedures will be published elsewhere.
15. Photon Engineering, LLC, www.photonengr.com
16. Yashchuk, V. V., "Optimal Measurement Strategies for Effective Suppression of Drift Errors," Rev. Sci. Instrum. 80, 115101/1-10 (2009).
17. Kirschman, J. L., Domning, E. E., McKinney, W. R., Morrison, G. Y., Smith, B. V., and Yashchuk, V. V., "Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory," Proc. SPIE 7077, 1-12 (2008).
18. www.insyncoptics.com
19. Geckeler, R. D., Just, A., Krause, M., and Yashchuk, V. V., "Autocollimators for Deflectometry: Current Status and Future Progress," Nucl. Instr. and Meth. A 616, 140-146 (2010).
20. Yashchuk, V. V., McKinney, W. R., Warwick, T., Noll, T., Siewert, F., Zeschke, T., and Geckeler, R. D., "Proposal for a Universal Test Mirror for Characterization of Slope Measuring Instruments," Proc. SPIE 6704, 1-12 (2007).