Electron holography characterization of the electrostatic potential of thin high-dielectric film embedded in gate stack

Applied Physics Letters

Volumn 99, Issue 16, 2011, Pages

  Yao, Y ^a   Yang, Y ^a   Duan, X F ^a   Wang, Y G ^a   Yu, R C ^a   Xu, Q X ^b  

^a INSTITUTE OF PHYSICS   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC POTENTIALS; GATE STACKS; HIGH SPATIAL RESOLUTION; MATERIAL DISTRIBUTION; PHYSICAL PARAMETERS;

DIELECTRIC FILMS; ELECTRON HOLOGRAPHY; ELECTROSTATICS; LOGIC GATES;

DIELECTRIC DEVICES;

EID: 80155159767     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3652770     Document Type: Article

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