Dark field electron holography for quantitative strain measurements with nanometer-scale spatial resolution

Applied Physics Letters

Volumn 95, Issue 5, 2009, Pages

  Cooper, David ^a   Barnes, Jean Paul ^a   Hartmann, Jean Michel ^a   B́ch́, Armand ^b   Rouviere, Jean Luc ^b  

^a CEA LETI   (France)

^b MINATEC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND NOISE; DARK FIELD; EXPERIMENTAL ERRORS; FIELD OF VIEWS; NANO-METER-SCALE; SPATIAL RESOLUTION; STRAIN MAPS; STRAINED SIGE; TWO-DIMENSIONAL;

ELECTRON HOLOGRAPHY; HOLOGRAPHIC INTERFEROMETRY; IMAGE RESOLUTION; SPECIMEN PREPARATION; STRAIN GAGES;

STRAIN MEASUREMENT;

EID: 68349154413     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3196549     Document Type: Article

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