Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms

Carbon

Volumn 50, Issue 2, 2012, Pages 404-410

  Joe, Minwoong ^a   Moon, Myoung Woon ^a   Oh, Jungsoo ^a   Lee, Kyu Hwan ^a   Lee, Kwang Ryeol ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLES OF INCIDENCE; CARBON ATOMS; CARBON DEPOSITION; DEPOSITED FILMS; GRAZING INCIDENCE; GROWING SURFACES; GROWTH MODES; MOLECULAR DYNAMICS SIMULATIONS; MORPHOLOGICAL EVOLUTION; NORMAL INCIDENCE; ROUGH SURFACES; SEED FORMATION; SEED STRUCTURE; SHADOWING EFFECTS; SLOPING SURFACES; SMOOTH SURFACE; SURFACE IRREGULARITIES; UPHILL TRANSPORT;

AMORPHOUS FILMS; ATOMS; CARBON FILMS; FILM GROWTH; MOLECULAR DYNAMICS; MOLECULAR MECHANICS; OPTICS; SURFACE MEASUREMENT; SURFACE STRUCTURE;

AMORPHOUS CARBON;

EID: 80055093112     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2011.08.053     Document Type: Article

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