Designing Nanostructures by Glancing Angle Deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5219, Issue , 2003, Pages 59-73

  Zhao, Y P ^a   Ye, D X ^b   Wang, G C ^b   Lu, T M ^b  

^a UNIVERSITY OF GEORGIA   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Glancing angle deposition; Nanorods; Nanostructures; Sculptured thin film

Indexed keywords

GLANCING ANGLE DEPOSITION (GLAD); NANORODS; NANOWIRES; SCULPTURED THIN FILMS;

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COMPUTER PROGRAMMING; CRYSTAL GROWTH; HIGH TEMPERATURE EFFECTS; MULTILAYERS; PHYSICAL VAPOR DEPOSITION; POROSITY; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL); THIN FILMS;

NANOSTRUCTURED MATERIALS;

EID: 2342524614     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505253     Document Type: Conference Paper

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