Free-standing inductive grid filter for infrared radiation rejection

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1339-1342

  Jefimovs, Konstantins ^a   Laukkanen, Janne ^a   Vallius, Tuomas ^a   Pilvi, Tero ^b   Ritala, Mikko ^b   Meilahti, Tomi ^c   Kaipiainen, Matti ^c   Bavdaz, Marcos ^d   Leskelä, Markku ^b   Turunen, Jari ^a  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c Oxford Instruments Analytical Oy   (Finland)

^d EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

Inductive grid filter; Infrared rejection; Metallic nanostructures

Indexed keywords

DEPOSITION; ELECTRON BEAM LITHOGRAPHY; INFRARED RADIATION; IRIDIUM; NANOSTRUCTURED MATERIALS; SILICA;

INDUCTIVE GRID FILTER; INFRARED REJECTION; METALLIC NANOSTRUCTURES;

WAVE FILTERS;

EID: 33646066575     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.047     Document Type: Article

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