High purity iridium thin films depositions using the inorganic IrF 6

Proceedings - Electrochemical Society

Volumn PV 2005-05, Issue , 2005, Pages 354-359

  Dussarrat, Christian ^a   Gatineau, Julien ^a  

^a AIR LIQUIDE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; IRIDIUM COMPOUNDS; THERMAL EFFECTS;

ATOMIC LAYER DEPOSITION (ALD); THERMAL CLEANING METHOD;

THIN FILMS;

EID: 31844448110     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. J. Gatineau, K. Yanagita, C. Dussarrat, article to be released in 2005.