Phase control of iridium and iridium oxide thin films in atomic layer deposition

Journal of Applied Physics

Volumn 103, Issue 2, 2008, Pages

  Kim, Sung Wook ^a   Kwon, Se Hun ^a   Kwak, Dong Kee ^a   Kang, Sang Won ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; ELECTRON SPECTROSCOPY; IRIDIUM COMPOUNDS; OXIDE FILMS; OXYGEN; PHASE TRANSITIONS;

IRIDIUM OXIDE THIN FILMS; OXYGEN PARTIAL PRESSURE;

THIN FILMS;

EID: 38849197859     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2836965     Document Type: Article

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