Conformal polymeric thin films by low-temperature rapid initiated chemical vapor deposition (iCVD) using tert-butyl peroxybenzoate as an initiator

ACS Applied Materials and Interfaces

Volumn 3, Issue 7, 2011, Pages 2410-2416

  Xu, Jingjing ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

chemical vapor deposition; conformal; tert butyl peroxybenzoate (TBPOB) initiator; thin films

Indexed keywords

AROMATIC GROUP; CONFORMAL; CONFORMAL DEPOSITION; CONFORMALITY; CYCLOHEXYL METHACRYLATES; DEPOSITION SURFACE; END GROUPS; FILAMENT TEMPERATURE; FTIR; HIGH TEMPERATURE; IDENTICAL PROCESS; LOW TEMPERATURES; MAIN CHAINS; MEDICAL DEVICES; NON-PLANAR STRUCTURES; PEAK INTENSITY; POLYMER CHAINS; POLYMERIC SUBSTRATE; SCANNING ELECTRON MICROGRAPHS; SPECTRAL SIGNATURE; STEP COVERAGE; STICKING COEFFICIENTS; SURFACE CONCENTRATION; TEMPERATURE SENSITIVE; TERT-BUTYL PEROXIDE; TERT-BUTYL PEROXYBENZOATE;

BIOMEDICAL ENGINEERING; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INITIATORS (CHEMICAL); MONOMERS; PHOTOELECTRON SPECTROSCOPY; POLYMERIC FILMS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPOSITION;

EID: 80053624774     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am200322k     Document Type: Article

References (35)

1. Wilson, J. T.; Cui, W. X.; Chaikof, E. L. Nano Lett. 2008, 8, 1940-1948
2. Stoldt, C. R.; Carraro, C.; Ashurst, W. R.; Gao, D.; Howe, R. T.; Maboudian, R. Sens. Actuators, A 2002, 97-98, 410-415
3. Asatekin, A.; Gleason, K. K. Nano Lett. 2011, 11, 677-686
4. Ozaydin-Ince, G.; Dubach, J. M.; Gleason, K. K.; Clark, H. A. Proc. Natl. Acad. Sci. U.S.A. 2011, 108, 2656-2661
5. Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.; George, S. M. Chem. Mater. 2003, 15, 3507-3517
6. Alf, M. E.; Asatekin, A.; Barr, M. C.; Baxamusa, S. H.; Chelawat, H.; Ozaydin-Ince, G.; Petruczok, C. D.; Sreenivasan, R.; Tenhaeff, W. E.; Trujillo, N. J.; Vaddiraju, S.; Xu, J. J.; Gleason, K. K. Adv. Mater. 2010, 22, 1993-2027
7. Dameron, A. A.; Seghete, D.; Burton, B. B.; Davidson, S. D.; Cavanagh, A. S.; Bertrand, J. A.; George, S. M. Chem. Mater. 2008, 20, 3315-3326
8. Chen, Y.; Haddon, R. C.; Fang, S.; Rao, A. M.; Lee, W. H.; Dickey, E. C.; Grulke, E. A.; Pendergrass, J. C.; Chavan, A.; Haley, B. E.; Smalley, R. E. J. Mater. Res. 1998, 13, 2423-2431
9. Kim, J. H.; Park, P. K.; Lee, C. H.; Kwon, H. H. J. Membr. Sci. 2008, 321, 190-198
10. Xu, J. J.; Gleason, K. K. Chem. Mater. 2010, 22, 1732-1738
11. Tenhaeff, W. E.; McIntosh, L. D.; Gleason, K. K. Adv. Funct. Mater. 2010, 20, 1144-1151
12. Yang, R.; Xu, J. J.; Ozaydin-Ince, G.; Wong, S. Y.; Gleason, K. K. Chem. Mater. 2011, 23, 1263-1272
13. Baxamusa, S. H.; Gleason, K. K. Chem. Vap. Deposition 2008, 14, 313-318
14. Ozaydin-Ince, G.; Gleason, K. K. J. Vac. Sci. Technol., A 2009, 27, 1135-1143
15. Lau, K. K. S.; Gleason, K. K. Adv. Mater. 2006, 18, 1972-1977
16. Im, S. G.; Bong, K. W.; Kim, B. S.; Baxamusa, S. H.; Hammond, P. T.; Doyle, P. S.; Gleason, K. K. J. Am. Chem. Soc. 2008, 130, 14424
17. Denisova, E. T.; Denisova, T. G.; Pokidova, T. S. Handbook of Free Radical Initiators; Wiley: New York, 2003.
18. Yasutake, M.; Hiki, S.; Andou, Y.; Nishida, H.; Endo, T. Macromolecules 2003, 36, 5974-5981
19. Lau, K. K. S.; Gleason, K. K. Macromolecules 2006, 39, 3688-3694
20. Kramer, N. J.; Sachteleben, E.; Ozaydin-Ince, G.; van de Sanden, R.; Gleason, K. K. Macromolecules 2010, 43, 8344-8347
21. Tenhaeff, W. E.; McIntosh, L. D.; Gleason, K. K. Adv. Funct. Mater. 2010, 20, 1144-1151
22. Trujillo, N. J.; Wu, Q. G.; Gleason, K. K. Adv. Funct. Mater. 2010, 20, 607-616
23. Martin, T. P.; Kooi, S. E.; Chang, S. H.; Sedransk, K. L.; Gleason, K. K. Biomaterials 2007, 28, 909-915
24. Lewis, H. G. P.; Caulfield, J. A.; Gleason, K. K. Langmuir 2001, 17, 7652-7655
25. Chan, K.; Gleason, K. K. Chem. Vap. Deposition 2005, 11, 437-443
26. Chan, K.; Gleason, K. K. Langmuir 2005, 21, 11773-11779
27. O'Shaughnessy, W. S.; Baxamusa, S.; Gleason, K. K. Chem. Mater. 2007, 19, 5836-5838
28. Nozaki, K.; Bartlett, P. D. J. Am. Chem. Soc. 1946, 68, 1686-1692
29. Nakata, T.; Tokumaru, K.; Simamura, O. Tetrahedron Lett. 1967, 3303
30. Sacak, M.; Oflaz, F. J. Appl. Polym. Sci. 1993, 50, 1909-1916
31. Cheng, S. Y.; Tseng, J. M.; Lin, S. Y.; Gupta, J. P.; Shu, C. M. J. Therm. Anal. Calorim. 2008, 93, 121-126
32. Gupta, M.; Gleason, K. K. Thin Solid Films 2006, 515, 1579-1584
33. Polymer Handbook, 4 th ed.; Brandrup, J.; Immergut, E. H.; Grulke, E. A., Eds.; Wiley-Interscience: New York, 1999.
34. Beamson, G.; Briggs, D. High Resolution XPS of Organic Polymers: The Scienta ESCA300 Database; John Wiley & Sons: Chichester, UK, 1992.
35. Ozaydin-Ince, G.; Gleason, K. K. Chem. Vap. Deposition 2010, 16, 100-105