SCOPUS 정보 검색 플랫폼

Chemical Vapor Deposition

Volumn 16, Issue 1-3, 2010, Pages 100-105

Tunable conformality of polymer coatings on high aspect ratio features

(2) Ozaydin Ince, Gozde a Gleason, Karen K a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

Conformality; ICVD; Microtrenches; Polymer nanotubes; Step coverage

Indexed keywords

BALLISTIC MODEL; CONCENTRATION OF; CONFORMAL COVERAGE; CONFORMALITY; CROSS-LINKED POLYMERS; DEPOSITION REGIMES; DIACRYLATES; HIGH ASPECT RATIO; MICROTRENCHES; POLYMER COATING; POLYMER NANOTUBES; RADICAL INITIATORS; STEP COVERAGE; STICKING COEFFICIENTS; SUBSTRATE TEMPERATURE; SURFACE CONCENTRATION; TEMPLATING;

CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); ETHYLENE; ETHYLENE GLYCOL; MONOMERS; NANOTUBES; POLYMERIC FILMS; PRESSURE DROP;

ASPECT RATIO;

EID: 77950255719 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.200906821 Document Type: Article

Times cited : (53)

References (25)

1
- 78649772536
- C. Whitman, M. M. Moslehi, A. Paranjpe, L. Velo, T. Omstead, J. Vac. Sci. Technol. A 1999, 17, 1893.
- (1999) J. Vac. Sci. Technol. a , vol.17 , pp. 1893
- Whitman, C.¹ Moslehi, M.M.² Paranjpe, A.³ Velo, L.⁴ Omstead, T.⁵

2
- 1642369517
- S. L. Burkett, X. Qiao, D. Temple, B. Stoner, G. McGuire, J. Vac. Sci. Technol. B 2004, 22, 248.
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 248
- Burkett, S.L.¹ Qiao, X.² Temple, D.³ Stoner, B.⁴ McGuire, G.⁵

3
- 24344502046
- J. G. C. Veinot, T. J. Marks, Acc. Chem. Res. 2005, 38, 632.
- (2005) Acc. Chem. Res. , vol.38 , pp. 632
- Veinot, J.G.C.¹ Marks, T.J.²

4
- 0032653899
- G. Urban, Sens. Actuators 1999, 74, 219.
- (1999) Sens. Actuators , vol.74 , pp. 219
- Urban, G.¹

5
- 28144451640
- M. Ma, Y. Mao, M. Gupta, K. K. Gleason, G. C. Rutledge, Macromolecules 2005, 38, 9742.
- (2005) Macromolecules , vol.38 , pp. 9742
- Ma, M.¹ Mao, Y.² Gupta, M.³ Gleason, K.K.⁴ Rutledge, G.C.⁵

6
- 33846566903
- M. Ma, M. Gupta, Z. Li, L. Zhai, K. K. Gleason, R. E. Cohen, M. F. Rubner, G. C. Rutledge, Adv. Mater. 2007, 19, 255.
- (2007) Adv. Mater , vol.19 , pp. 255
- Ma, M.¹ Gupta, M.² Li, Z.³ Zhai, L.⁴ Gleason, K.K.⁵ Cohen, R.E.⁶ Rubner, M.F.⁷ Rutledge, G.C.⁸

7
- 40549135371
- M. Gupta, V. Kapur, N. M. Pinkerton, K. K. Gleason, Chem. Mater. 2008, 20, 1646.
- (2008) Chem. Mater , vol.20 , pp. 1646
- Gupta, M.¹ Kapur, V.² Pinkerton, N.M.³ Gleason, K.K.⁴

8
- 38949154472
- L. A. Baker, S. P. Bird, Nature Nanotech. 2008, 3, 73.
- (2008) Nature Nanotech , vol.3 , pp. 73
- Baker, L.A.¹ Bird, S.P.²

9
- 0000279453
- C. R. Martin, Chem. Mater. 1996, 8, 1739.
- (1996) Chem. Mater , vol.8 , pp. 1739
- Martin, C.R.¹

10
- 33645652940
- J. Jang, S. Ko, Y. Kim, Adv. Funct. Mater. 2006, 16, 754.
- (2006) Adv. Funct. Mater , vol.16 , pp. 754
- Jang, J.¹ Ko, S.² Kim, Y.³

11
- 15544375681
- R. Dersch, M. Steinhart, U. Boudriot, A. Greiner, J. H. Wendorff, Polym. Adv. Technol. 2005, 16, 276.
- (2005) Polym. Adv. Technol. , vol.16 , pp. 276
- Dersch, R.¹ Steinhart, M.² Boudriot, U.³ Greiner, A.⁴ Wendorff, J.H.⁵

12
- 34250338863
- S. Grimm, K. Schwirn, P. Gcring, H. Knoll, P. T. Miclea, A. Greiner, J. H. Wendorff, R. B. Wehrspohn, U. Gcsele, M. Steinhart, Small 2007, 3, 993.
- (2007) Small , vol.3 , pp. 993
- Grimm, S.¹ Schwirn, K.² Gcring, P.³ Knoll, H.⁴ Miclea, P.T.⁵ Greiner, A.⁶ Wendorff, J.H.⁷ Wehrspohn, R.B.⁸ Gcsele, U.⁹ Steinhart, M.¹⁰

13
- 33750507480
- K. J. Lee, J. H. Oh, Y. Kim, J. Jang, Chem. Mater. 2006, 18, 5002.
- (2006) Chem. Mater , vol.18 , pp. 5002
- Lee, K.J.¹ Oh, J.H.² Kim, Y.³ Jang, J.⁴

14
- 0242425738
- S. M. Rossnagel, J. Vac. Sci. Technol. A 2003, 21, S74.
- (2003) J. Vac. Sci. Technol. a , vol.21
- Rossnagel, S.M.¹

15
- 0028498145
- D. G. Coronell, K. F. Jensen, J. Electrochem. Soc. 1994, 141, 2545.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 2545
- Coronell, D.G.¹ Jensen, K.F.²

16
- 0033166104
- H. Komiyama, Y. Shimogaki, Y. Egashira, Chem. Eng. Sci. 1999, 54, 1941.
- (1999) Chem. Eng. Sci. , vol.54 , pp. 1941
- Komiyama, H.¹ Shimogaki, Y.² Egashira, Y.³

17
- 55349144858
- S. H. Baxamusa, K. K. Gleason, Chem. Vap. Deposition 2008, 14, 313.
- (2008) Chem. Vap. Deposition , vol.14 , pp. 313
- Baxamusa, S.H.¹ Gleason, K.K.²

18
- 64349119981
- S. H. Baxamusa, K. K. Gleason, Thin Solid Films 2009, 517, 3536.
- (2009) Thin Solid Films , vol.517 , pp. 3536
- Baxamusa, S.H.¹ Gleason, K.K.²

19
- 33744462659
- K. K. S. Lau, K. K. Gleason, Macromolecules 2006, 39, 3688.
- (2006) Macromolecules , vol.39 , pp. 3688
- Lau, K.K.S.¹ Gleason, K.K.²

20
- 85046387534
- D. D. Eley, E. K. Rideal, Nature 1940, 146, 401.
- (1940) Nature , vol.146 , pp. 401
- Eley, D.D.¹ Rideal, E.K.²

21
- 25844517208
- K. Chan, K. K. Gleason, Langmuir 2005, 21, 8930.
- (2005) Langmuir , vol.21 , pp. 8930
- Chan, K.¹ Gleason, K.K.²

22
- 33644804848
- K. Chan, K. K. Gleason, J. Electrochem. Soc. 2006, 153, C223.
- (2006) J. Electrochem. Soc. , vol.153
- Chan, K.¹ Gleason, K.K.²

23
- 40549093381
- L. H. Lee, K. K. Gleason, J. Electrochem. Soc. 2008, 155, G78.
- (2008) J. Electrochem. Soc. , vol.155
- Lee, L.H.¹ Gleason, K.K.²

24
- 12444272525
- S. Brunauer, P. H. Emmett, E. Teller, J. Am. Chem. Soc. 1938, 60, 309.
- (1938) J. Am. Chem. Soc. , vol.60 , pp. 309
- Brunauer, S.¹ Emmett, P.H.² Teller, E.³

25
- 0033410344
- P. Decker, Macromol. Symp. 1999, 143, 45.
- (1999) Macromol. Symp , vol.143 , pp. 45
- Decker, P.¹

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